Subject: Oxide etch rate?
From: Stephanie Claussen <sclaussen@stanford.edu>
Date: Thu, 18 Oct 2012 11:12:47 -0700
Thu, 18 Oct 2012 11:12:47 -0700
Hi everyone,

I was wondering if anyone has characterized the etch rate of thermal oxide
in lampoly recently. On the wiki, it says it's selective over Si ~20:1, but
was hoping to get a more precise ratio.

Thanks!
Stephanie


Hi everyone,

I was wondering if anyone has characterized the etch rate of thermal oxide in lampoly recently. On the wiki, it says it's selective over Si ~20:1, but was hoping to get a more precise ratio.

Thanks!
Stephanie