Messages 0xx
01:
Comment lampoly: software timer/counter error.
(
booth.snf.stanford.edu)
02:
Problem lampoly: "Hard pressure tolerance reached during RF ON step"
(
kalavade.snf.stanford.edu)
03:
Problem Clear lampoly: re-teach throttle controller @pressure 10,15 m/t.
(
cbaxter.snf.stanford.edu)
04:
Shutdown lampoly: purging chamber over night with n2. chamber will need to be vented, in order to remove vat throttle valve assy.
(
cbaxter.snf.stanford.edu)
05:
Shutdown Clear lampoly: we not vent chamber at this time, lam eng. will try to cal. gas's again.
(
cbaxter.snf.stanford.edu)
06:
Shutdown lampoly: need to vent chamber and check throttle valve.
(
cbaxter.snf.stanford.edu)
07:
Shutdown Clear lampoly: chamber back together and tested..
(
cbaxter.snf.stanford.edu)
08:
Problem lampoly: alarm 184 - water chiller has failed - cleared the alarm, but comes back with same problem - no processing done
(
frankliu.snf.stanford.edu)
09:
Problem lampoly: not sure the last one went through - water chiller has failed
(
frankliu.snf.stanford.edu)
10:
Problem lampoly: Still not registering yellow - one last time - water chiller has failed
(
frankliu.snf.stanford.edu)
11:
Shutdown lampoly: Shutdown - chiller fault
(
booth.snf.stanford.edu)
12:
Shutdown Clear lampoly: changed both filter on chiller
(
cbaxter.snf.stanford.edu)
13:
Problem Clear lampoly:
(
cbaxter.snf.stanford.edu)
14:
Problem Clear lampoly: changed filter
(
cbaxter.snf.stanford.edu)
15:
Problem Clear lampoly:
(
cbaxter.snf.stanford.edu)
16:
Problem lampoly: operating system error in lam-
(
kalavade.snf.stanford.edu)
17:
Problem Clear lampoly: rebooth system...
(
cbaxter.snf.stanford.edu)
18:
Problem lampoly: internal timer will time out in 23 hours
(
bchui.snf.stanford.edu)
19:
Problem lampoly: Internal timer overflowed
(
bchui.snf.stanford.edu)
20:
Problem Clear lampoly: rebooted lampoly.
(
booth.snf.stanford.edu)
21:
Shutdown lampoly: Wafer in chamber. Jim
(
mordovan.snf.stanford.edu)
22:
Shutdown Clear lampoly: removed wafer & did DI wipe of chamber.
(
booth.snf.stanford.edu)
23:
Shutdown lampoly: transport failure
(
mordovan.snf.stanford.edu)
24:
Shutdown Clear lampoly: removed wafer & cleared shutdown.
(
booth.snf.stanford.edu)
25:
Problem lampoly: Inner Ld Lk Door not closed
(
price.snf.stanford.edu)
26:
Problem Clear lampoly: cleared fault. Process restarted normally.
(
booth.snf.stanford.edu)
27:
Problem lampoly: LD LK inner Door not closed-waf in chbr.
(
price.snf.stanford.edu)
28:
Problem Clear lampoly: cleared door, processed wafer & put in box.
(
booth.snf.stanford.edu)
29:
Shutdown lampoly: chiller is leaking.
(
booth.snf.stanford.edu)
30:
Shutdown Clear lampoly: replaced leaking poly line.
(
booth.snf.stanford.edu)
38:
Shutdown lampoly: load lock door down AGAIN
(
aaronp.snf.stanford.edu)
39:
Shutdown Clear lampoly: Solenoid activated on removal of cover. Jim
(
mcvittie.snf.stanford.edu)
40:
Shutdown lampoly: input ld lk door not closing
(
price.snf.stanford.edu)
41:
Shutdown Clear lampoly: Reset when sol. cover came off. Jim
(
mcvittie.snf.stanford.edu)
42:
Shutdown lampoly:
(
jawad.snf.stanford.edu)
43:
Shutdown Clear lampoly: Contact Nancy, Aaron or Jim for fix.
(
mcvittie.snf.stanford.edu)
44:
Problem lampoly: MFC#7 O2 intermittant zero drift noticed.
(
booth.snf.stanford.edu)
45:
Shutdown lampoly: mfc#7 is removed for repair.
(
cbaxter.snf.stanford.edu)
46:
Shutdown Clear lampoly: installed o2 mfc and tested
(
cbaxter.snf.stanford.edu)
47:
Problem Clear lampoly: installed o2 mfc and tested
(
cbaxter.snf.stanford.edu)
48:
Shutdown lampoly: loader arm stuck
(
true.snf.stanford.edu)
49:
Shutdown Clear lampoly: initialized wafer transport.
(
booth.snf.stanford.edu)
50:
Shutdown lampoly: gas 1 hard tolerance faultDate: Nov 16, 2000 7:47:30 PM
(
true.snf.stanford.edu)
51:
Shutdown lampoly: gas 1 hard tolerance faultDate: Nov 16, 2000 10:46:21 PM
(
cbaxter.snf.stanford.edu)
52:
Shutdown lampoly:
(
anolley.snf.stanford.edu)
53:
Shutdown lampoly:
(
booth.snf.stanford.edu)
54:
Problem lampoly 2001-01-17 15:01:47: system error: internal timer overflow
(
booth.snf.stanford.edu)
55:
Re: Problem lampoly 2001-01-17 15:01:47: system error: internal timer overflow
(
booth.snf.stanford.edu)
56:
Problem lampoly 2001-01-18 20:16:04: wafer stuck in loader
(
tkramer.snf.stanford.edu)
57:
Re: Problem lampoly 2001-01-18 20:16:04: wafer stuck in loader
(
cbaxter.snf.stanford.edu)
58:
Shutdown lampoly 2001-01-22 07:49:09: Not recovered yet from Saturday power outage.
(
booth.snf.stanford.edu)
59:
Re: Shutdown lampoly 2001-01-22 07:49:09: Not recovered yet from Saturday power outage.
(
booth.snf.stanford.edu)
60:
Shutdown lampoly 2001-02-09 15:44:39: No HBr gas available
(
anolley.snf.stanford.edu)
61:
Re: Shutdown lampoly 2001-02-09 15:44:39: HBr is ready to use
(
seymour.snf.stanford.edu)
62:
Problem lampoly 2001-02-28 19:44:02: wafer stuck in chamber at 7:30 pm
(
metzler.snf.stanford.edu)
63:
Re: Problem lampoly 2001-02-28 19:44:02: wafer stuck in chamber at 7:30 pm
(
cbaxter.snf.stanford.edu)
64:
Problem lampoly 2001-03-01 00:53:55: blank Si wafer stuck in chamber at 12:45 am
(
metzler.snf.stanford.edu)
65:
Shutdown lampoly 2001-03-01 01:12:33: wafer stuck in chamber
(
hopcroft.snf.stanford.edu)
66:
Re: Shutdown lampoly 2001-03-01 01:12:33: wafer stuck in chamber
(
mcvittie.snf.stanford.edu)
67:
Re: Problem lampoly 2001-03-01 00:53:55: blank Si wafer stuck in chamber at 12:45 am
(
mcvittie.snf.stanford.edu)
68:
Shutdown lampoly 2001-03-12 07:26:51: Freon 116 bottle change
(
seymour.snf.stanford.edu)
69:
Re: Shutdown lampoly 2001-03-12 07:26:51: Freon 116 bottle changed leak check passed
(
seymour.snf.stanford.edu)
70:
Shutdown lampoly 2001-03-12 18:53:39: flake's on wafer....
(
cbaxter.snf.stanford.edu)
71:
Re: Shutdown lampoly 2001-03-12 18:53:39: flake's on wafer....
(
cbaxter.snf.stanford.edu)
72:
Comment lampoly 2001-03-13 12:50:12: 036 Alarm
(
beckwith.snf.stanford.edu)
73:
Shutdown lampoly 2001-03-19 13:38:17: FLAKES IN CHAMBER!
(
beckwith.snf.stanford.edu)
74:
Re: Shutdown lampoly 2001-03-19 13:38:17: FLAKES IN CHAMBER!
(
rcrane.snf.stanford.edu)
75:
Comment lampoly 2001-03-19 13:56:11: Flakes in chamber, testing
(
rcrane.snf.stanford.edu)
76:
Problem lampoly 2001-03-19 13:57:07: Flakes in chamber, testing
(
rcrane.snf.stanford.edu)
77:
Shutdown lampoly 2001-03-19 15:26:39: severe particles
(
grupp.snf.stanford.edu)
78:
Re: Shutdown lampoly 2001-03-19 15:26:39: severe particles
(
cbaxter.snf.stanford.edu)
79:
Re: Problem lampoly 2001-03-19 13:57:07: Flakes in chamber, testing
(
cbaxter.snf.stanford.edu)
80:
Shutdown lampoly 2001-03-21 13:05:03:
(
beckwith.snf.stanford.edu)
81:
Re: Shutdown lampoly 2001-03-21 13:05:03: LAMpoly pressure unstable
(
booth.snf.stanford.edu)
82:
Shutdown lampoly 2001-03-26 07:23:44: LoadLock pump needs oil added.
(
booth.snf.stanford.edu)
83:
Re: Shutdown lampoly 2001-03-26 07:23:44: LoadLock pump needs oil added.
(
booth.snf.stanford.edu)
84:
Shutdown lampoly 2001-04-04 10:44:15: Need to install new bottle of BCl3.
(
booth.snf.stanford.edu)
85:
Re: Shutdown lampoly 2001-04-04 10:44:15: Need to install new bottle of BCl3.
(
booth.snf.stanford.edu)
86:
Re: Shutdown lampoly 2001-04-04 10:44:15: Need to install new bottle of BCl3.
(
Jim McVittie)
87:
Shutdown lampoly 2001-04-12 18:08:45: wafer stuck
(
ychliu.snf.stanford.edu)
88:
Re: Shutdown lampoly 2001-04-12 18:08:45: wafer stuck
(
cbaxter.snf.stanford.edu)
89:
Shutdown lampoly 2001-04-16 08:51:30: Shutdown - operator screen is dead
(
booth.snf.stanford.edu)
90:
Re: Shutdown lampoly 2001-04-16 08:51:30: Shutdown - operator screen is dead
(
booth.snf.stanford.edu)
91:
Problem lampoly 2001-04-17 10:59:40: Severe particle generation problem
(
greene.snf.stanford.edu)
92:
Shutdown lampoly 2001-04-17 19:08:13: Still has Particle Problem After Wet Clean
(
mcvittie.snf.stanford.edu)
93:
Re: Shutdown lampoly 2001-04-17 19:08:13: Still has Particle Problem After Wet Clean
(
mcvittie.snf.stanford.edu)
94:
Shutdown lampoly 2001-04-24 10:45:59: Pump being sent out for repair
(
booth.snf.stanford.edu)
95:
Re: Shutdown lampoly 2001-04-24 10:45:59: Pump being sent out for repair
(
cbaxter.snf.stanford.edu)
96:
Re: Problem lampoly 2001-04-17 10:59:40: Severe particle generation problem
(
cbaxter.snf.stanford.edu)
97:
Shutdown lampoly 2001-05-09 11:34:27: need to repair water leak.
(
booth.snf.stanford.edu)
98:
Re: Shutdown lampoly 2001-05-09 11:34:27: need to repair water leak.
(
booth.snf.stanford.edu)
99:
Shutdown lampoly 2001-05-10 11:58:23: Wafer transport failed.
(
booth.snf.stanford.edu)