Messages 0xx


01: Comment lampoly: software timer/counter error. (booth.snf.stanford.edu)
02: Problem lampoly: "Hard pressure tolerance reached during RF ON step" (kalavade.snf.stanford.edu)
03: Problem Clear lampoly: re-teach throttle controller @pressure 10,15 m/t. (cbaxter.snf.stanford.edu)
04: Shutdown lampoly: purging chamber over night with n2. chamber will need to be vented, in order to remove vat throttle valve assy. (cbaxter.snf.stanford.edu)
05: Shutdown Clear lampoly: we not vent chamber at this time, lam eng. will try to cal. gas's again. (cbaxter.snf.stanford.edu)
06: Shutdown lampoly: need to vent chamber and check throttle valve. (cbaxter.snf.stanford.edu)
07: Shutdown Clear lampoly: chamber back together and tested.. (cbaxter.snf.stanford.edu)
08: Problem lampoly: alarm 184 - water chiller has failed - cleared the alarm, but comes back with same problem - no processing done (frankliu.snf.stanford.edu)
09: Problem lampoly: not sure the last one went through - water chiller has failed (frankliu.snf.stanford.edu)
10: Problem lampoly: Still not registering yellow - one last time - water chiller has failed (frankliu.snf.stanford.edu)
11: Shutdown lampoly: Shutdown - chiller fault (booth.snf.stanford.edu)
12: Shutdown Clear lampoly: changed both filter on chiller (cbaxter.snf.stanford.edu)
13: Problem Clear lampoly: (cbaxter.snf.stanford.edu)
14: Problem Clear lampoly: changed filter (cbaxter.snf.stanford.edu)
15: Problem Clear lampoly: (cbaxter.snf.stanford.edu)
16: Problem lampoly: operating system error in lam- (kalavade.snf.stanford.edu)
17: Problem Clear lampoly: rebooth system... (cbaxter.snf.stanford.edu)
18: Problem lampoly: internal timer will time out in 23 hours (bchui.snf.stanford.edu)
19: Problem lampoly: Internal timer overflowed (bchui.snf.stanford.edu)
20: Problem Clear lampoly: rebooted lampoly. (booth.snf.stanford.edu)
21: Shutdown lampoly: Wafer in chamber. Jim (mordovan.snf.stanford.edu)
22: Shutdown Clear lampoly: removed wafer & did DI wipe of chamber. (booth.snf.stanford.edu)
23: Shutdown lampoly: transport failure (mordovan.snf.stanford.edu)
24: Shutdown Clear lampoly: removed wafer & cleared shutdown. (booth.snf.stanford.edu)
25: Problem lampoly: Inner Ld Lk Door not closed (price.snf.stanford.edu)
26: Problem Clear lampoly: cleared fault. Process restarted normally. (booth.snf.stanford.edu)
27: Problem lampoly: LD LK inner Door not closed-waf in chbr. (price.snf.stanford.edu)
28: Problem Clear lampoly: cleared door, processed wafer & put in box. (booth.snf.stanford.edu)
29: Shutdown lampoly: chiller is leaking. (booth.snf.stanford.edu)
30: Shutdown Clear lampoly: replaced leaking poly line. (booth.snf.stanford.edu)
38: Shutdown lampoly: load lock door down AGAIN (aaronp.snf.stanford.edu)
39: Shutdown Clear lampoly: Solenoid activated on removal of cover. Jim (mcvittie.snf.stanford.edu)
40: Shutdown lampoly: input ld lk door not closing (price.snf.stanford.edu)
41: Shutdown Clear lampoly: Reset when sol. cover came off. Jim (mcvittie.snf.stanford.edu)
42: Shutdown lampoly: (jawad.snf.stanford.edu)
43: Shutdown Clear lampoly: Contact Nancy, Aaron or Jim for fix. (mcvittie.snf.stanford.edu)
44: Problem lampoly: MFC#7 O2 intermittant zero drift noticed. (booth.snf.stanford.edu)
45: Shutdown lampoly: mfc#7 is removed for repair. (cbaxter.snf.stanford.edu)
46: Shutdown Clear lampoly: installed o2 mfc and tested (cbaxter.snf.stanford.edu)
47: Problem Clear lampoly: installed o2 mfc and tested (cbaxter.snf.stanford.edu)
48: Shutdown lampoly: loader arm stuck (true.snf.stanford.edu)
49: Shutdown Clear lampoly: initialized wafer transport. (booth.snf.stanford.edu)
50: Shutdown lampoly: gas 1 hard tolerance faultDate: Nov 16, 2000 7:47:30 PM (true.snf.stanford.edu)
51: Shutdown lampoly: gas 1 hard tolerance faultDate: Nov 16, 2000 10:46:21 PM (cbaxter.snf.stanford.edu)
52: Shutdown lampoly: (anolley.snf.stanford.edu)
53: Shutdown lampoly: (booth.snf.stanford.edu)
54: Problem lampoly 2001-01-17 15:01:47: system error: internal timer overflow (booth.snf.stanford.edu)
55: Re: Problem lampoly 2001-01-17 15:01:47: system error: internal timer overflow (booth.snf.stanford.edu)
56: Problem lampoly 2001-01-18 20:16:04: wafer stuck in loader (tkramer.snf.stanford.edu)
57: Re: Problem lampoly 2001-01-18 20:16:04: wafer stuck in loader (cbaxter.snf.stanford.edu)
58: Shutdown lampoly 2001-01-22 07:49:09: Not recovered yet from Saturday power outage. (booth.snf.stanford.edu)
59: Re: Shutdown lampoly 2001-01-22 07:49:09: Not recovered yet from Saturday power outage. (booth.snf.stanford.edu)
60: Shutdown lampoly 2001-02-09 15:44:39: No HBr gas available (anolley.snf.stanford.edu)
61: Re: Shutdown lampoly 2001-02-09 15:44:39: HBr is ready to use (seymour.snf.stanford.edu)
62: Problem lampoly 2001-02-28 19:44:02: wafer stuck in chamber at 7:30 pm (metzler.snf.stanford.edu)
63: Re: Problem lampoly 2001-02-28 19:44:02: wafer stuck in chamber at 7:30 pm (cbaxter.snf.stanford.edu)
64: Problem lampoly 2001-03-01 00:53:55: blank Si wafer stuck in chamber at 12:45 am (metzler.snf.stanford.edu)
65: Shutdown lampoly 2001-03-01 01:12:33: wafer stuck in chamber (hopcroft.snf.stanford.edu)
66: Re: Shutdown lampoly 2001-03-01 01:12:33: wafer stuck in chamber (mcvittie.snf.stanford.edu)
67: Re: Problem lampoly 2001-03-01 00:53:55: blank Si wafer stuck in chamber at 12:45 am (mcvittie.snf.stanford.edu)
68: Shutdown lampoly 2001-03-12 07:26:51: Freon 116 bottle change (seymour.snf.stanford.edu)
69: Re: Shutdown lampoly 2001-03-12 07:26:51: Freon 116 bottle changed leak check passed (seymour.snf.stanford.edu)
70: Shutdown lampoly 2001-03-12 18:53:39: flake's on wafer.... (cbaxter.snf.stanford.edu)
71: Re: Shutdown lampoly 2001-03-12 18:53:39: flake's on wafer.... (cbaxter.snf.stanford.edu)
72: Comment lampoly 2001-03-13 12:50:12: 036 Alarm (beckwith.snf.stanford.edu)
73: Shutdown lampoly 2001-03-19 13:38:17: FLAKES IN CHAMBER! (beckwith.snf.stanford.edu)
74: Re: Shutdown lampoly 2001-03-19 13:38:17: FLAKES IN CHAMBER! (rcrane.snf.stanford.edu)
75: Comment lampoly 2001-03-19 13:56:11: Flakes in chamber, testing (rcrane.snf.stanford.edu)
76: Problem lampoly 2001-03-19 13:57:07: Flakes in chamber, testing (rcrane.snf.stanford.edu)
77: Shutdown lampoly 2001-03-19 15:26:39: severe particles (grupp.snf.stanford.edu)
78: Re: Shutdown lampoly 2001-03-19 15:26:39: severe particles (cbaxter.snf.stanford.edu)
79: Re: Problem lampoly 2001-03-19 13:57:07: Flakes in chamber, testing (cbaxter.snf.stanford.edu)
80: Shutdown lampoly 2001-03-21 13:05:03: (beckwith.snf.stanford.edu)
81: Re: Shutdown lampoly 2001-03-21 13:05:03: LAMpoly pressure unstable (booth.snf.stanford.edu)
82: Shutdown lampoly 2001-03-26 07:23:44: LoadLock pump needs oil added. (booth.snf.stanford.edu)
83: Re: Shutdown lampoly 2001-03-26 07:23:44: LoadLock pump needs oil added. (booth.snf.stanford.edu)
84: Shutdown lampoly 2001-04-04 10:44:15: Need to install new bottle of BCl3. (booth.snf.stanford.edu)
85: Re: Shutdown lampoly 2001-04-04 10:44:15: Need to install new bottle of BCl3. (booth.snf.stanford.edu)
86: Re: Shutdown lampoly 2001-04-04 10:44:15: Need to install new bottle of BCl3. (Jim McVittie)
87: Shutdown lampoly 2001-04-12 18:08:45: wafer stuck (ychliu.snf.stanford.edu)
88: Re: Shutdown lampoly 2001-04-12 18:08:45: wafer stuck (cbaxter.snf.stanford.edu)
89: Shutdown lampoly 2001-04-16 08:51:30: Shutdown - operator screen is dead (booth.snf.stanford.edu)
90: Re: Shutdown lampoly 2001-04-16 08:51:30: Shutdown - operator screen is dead (booth.snf.stanford.edu)
91: Problem lampoly 2001-04-17 10:59:40: Severe particle generation problem (greene.snf.stanford.edu)
92: Shutdown lampoly 2001-04-17 19:08:13: Still has Particle Problem After Wet Clean (mcvittie.snf.stanford.edu)
93: Re: Shutdown lampoly 2001-04-17 19:08:13: Still has Particle Problem After Wet Clean (mcvittie.snf.stanford.edu)
94: Shutdown lampoly 2001-04-24 10:45:59: Pump being sent out for repair (booth.snf.stanford.edu)
95: Re: Shutdown lampoly 2001-04-24 10:45:59: Pump being sent out for repair (cbaxter.snf.stanford.edu)
96: Re: Problem lampoly 2001-04-17 10:59:40: Severe particle generation problem (cbaxter.snf.stanford.edu)
97: Shutdown lampoly 2001-05-09 11:34:27: need to repair water leak. (booth.snf.stanford.edu)
98: Re: Shutdown lampoly 2001-05-09 11:34:27: need to repair water leak. (booth.snf.stanford.edu)
99: Shutdown lampoly 2001-05-10 11:58:23: Wafer transport failed. (booth.snf.stanford.edu)