lampoly-pcs@snf.stanford.edu: 2193: Re: Shutdown lampoly SNF 2012-10-06 11:05:36: turbo down

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Subject: Re: Shutdown lampoly SNF 2012-10-06 11:05:36: turbo down
From: eenriquez@snf.stanford.edu

Replaced the turbo backing pump.  Ran 4 wafers with no problems.

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