Subject: Comment lampoly SNF 2012-10-08 15:58:18: Re: request for wet clean
From: bchui@snf.stanford.edu

Hi Elmer, Cesar, 
Thanks for getting the machine back online so quickly!  As for the wet clean, there
are indications the grass is related to my wafers in particular; still investigating.
 So the chamber might be OK. Thanks, Ben