Subject: Re: Shutdown lampoly SNF 2012-11-28 17:24:05: wafer stuck inside the chamber
From: eenriquez@snf.stanford.edu

Recovered user's quartz wafer.  The exit load lock cassette's wafer sensor could not
detect the quartz wafer.  The exit arm tried to pickup a second wafer from the chamber
with the quartz wafer still on the blade.