Messages 0xx


01: Problem AG4108: system stuck (yiching.snf.stanford.edu)
02: Problem Clear AG4108: reset chiller (mramsey.snf.stanford.edu)
03: Problem AG4108: Low Oven Water Cooling Flow- (kalavade.snf.stanford.edu)
04: Problem Clear AG4108: added cooling water. (booth.snf.stanford.edu)
05: Shutdown AG4108: Lamp Error- (kalavade.snf.stanford.edu)
06: Shutdown Clear AG4108: reconfigured & corrected EEPROM (booth.snf.stanford.edu)
07: Shutdown AG4108: Need immediate help (king.snf.stanford.edu)
08: Shutdown Clear AG4108: refilled chiller for oven cooling. (booth.snf.stanford.edu)
09: Shutdown AG4108: (mokhberi.snf.stanford.edu)
10: Shutdown AG4108: AG4108 (booth.snf.stanford.edu)
11: Shutdown AG4108: changing to oxidation quartzware. (booth.snf.stanford.edu)
12: Shutdown AG4108: changing to oxidation quartzware. (booth.snf.stanford.edu)
13: Problem AG4108 2001-02-24 17:42:47: 35: low oven H20 cooling flow, shut pwr OFF (dhelqaq.snf.stanford.edu)
14: Re: Problem AG4108 2001-02-24 17:42:47: 35: low oven H20 cooling flow, shut pwr OFF (booth.snf.stanford.edu)
15: Shutdown AG4108 2001-05-21 06:59:12: clean dirty quartz chamber (booth.snf.stanford.edu)
16: Re: Shutdown AG4108 2001-05-21 06:59:12: clean dirty quartz chamber (booth.snf.stanford.edu)
17: Problem AG4108 2001-05-30 14:01:50: LOBAT on NH3 gage (grupp.snf.stanford.edu)
18: Re: Problem AG4108 2001-05-30 14:01:50: LOBAT on NH3 gage (booth.snf.stanford.edu)
19: Problem AG4108 2001-06-04 21:37:40: NH3 LCD pressure display off (grupp.snf.stanford.edu)
20: Re: Problem AG4108 2001-06-04 21:37:40: NH3 LCD pressure display off (booth.snf.stanford.edu)
21: Problem AG4108 2001-08-10 18:56:25: gases (evelyn.snf.stanford.edu)
22: Problem AG4108 2001-08-10 19:13:30: gases (evelyn.snf.stanford.edu)
23: Re: Problem AG4108 2001-08-10 19:13:30: gases (booth.snf.stanford.edu)
24: Re: Problem AG4108 2001-08-10 18:56:25: gases (booth.snf.stanford.edu)
25: Shutdown AG4108 2001-08-25 07:49:40: facility (rcrane.snf.stanford.edu)
26: Re: Shutdown AG4108 2001-08-25 07:49:40: facility (rcrane.snf.stanford.edu)
27: Problem AG4108 2001-09-06 11:02:01: Ar gas (frankliu.snf.stanford.edu)
28: Re: Problem AG4108 2001-09-06 11:02:01: Ar gas (booth.snf.stanford.edu)
29: Problem AG4108 2001-09-21 11:16:46: NH3 feedbk not zero even if set to Zero (balaji.snf.stanford.edu)
30: Re: Problem AG4108 2001-09-21 11:16:46: NH3 feedbk not zero even if set to Zero (booth.snf.stanford.edu)
31: Problem AG4108 2001-11-09 11:19:39: dirty chamber (balaji.snf.stanford.edu)
32: Re: Problem AG4108 2001-11-09 11:19:39: dirty chamber (booth.snf.stanford.edu)
33: Problem AG4108 2001-12-11 17:11:55: no load from cooling to receiving (mcconnel.snf.stanford.edu)
34: Re: Problem AG4108 2001-12-11 17:11:55: no load from cooling to receiving (booth.snf.stanford.edu)
35: Problem AG4108 2002-01-12 18:43:46: out of forming gas (grupp.snf.stanford.edu)
36: Re: Problem AG4108 2002-01-12 18:43:46: out of forming gas (booth.snf.stanford.edu)
37: Problem AG4108 2002-02-13 10:56:40: RTA failure (khanh.snf.stanford.edu)
38: Shutdown AG4108 2002-02-13 11:37:04: Lampoly failure (khanh.snf.stanford.edu)
39: Re: Shutdown AG4108 2002-02-13 11:37:04: Lamp failure (booth.snf.stanford.edu)
40: Re: Problem AG4108 2002-02-13 10:56:40: RTA failure (booth.snf.stanford.edu)
41: Problem AG4108 2002-02-20 15:00:12: Config 1&2 values must be checked (booth.snf.stanford.edu)
42: Problem AG4108 2002-02-21 10:26:14: lamp failure, top center bank on RTA (khanh.snf.stanford.edu)
43: Shutdown AG4108 2002-02-21 10:26:38: Lamp failure (khanh.snf.stanford.edu)
44: Re: Shutdown AG4108 2002-02-21 10:26:38: Lamp failure (booth.snf.stanford.edu)
45: Re: Problem AG4108 2002-02-21 10:26:14: lamp failure, top center bank on RTA (booth.snf.stanford.edu)
46: Problem AG4108 2002-02-21 15:52:47: argon flow low. Recipes with argon do not run (hlkung.snf.stanford.edu)
47: Problem AG4108 2002-03-04 23:39:50: AR/LoO2 out of set range error (mcconnel.snf.stanford.edu)
48: Re: Problem AG4108 2002-03-04 23:39:50: AR/LoO2 out of set range error (booth.snf.stanford.edu)
49: Shutdown AG4108 2002-03-14 12:51:37: Disk error (khanh.snf.stanford.edu)
50: Re: Shutdown AG4108 2002-03-14 12:51:37: Disk error (booth.snf.stanford.edu)
51: Shutdown AG4108 2002-07-24 07:06:40: AG4108 Silicide cassette not available (booth.snf.stanford.edu)
52: Re: Shutdown AG4108 2002-07-24 07:06:40: AG4108 Silicide cassette not available (booth.snf.stanford.edu)
53: Shutdown AG4108 2002-08-19 09:58:34: (mokhberi.snf.stanford.edu)
54: Re: Shutdown AG4108 2002-08-19 09:58:34: (booth.snf.stanford.edu)
55: Comment AG4108 2002-10-21 18:16:01: software crash (xianliu.snf.stanford.edu)
56: Shutdown AG4108 2002-10-31 10:52:15: potentially breaking wafers (mcconnel.snf.stanford.edu)
57: Re: Shutdown AG4108 2002-10-31 10:52:15: potentially breaking wafers (booth.snf.stanford.edu)
58: Comment AG4108 2003-01-09 11:43:29: change tray (evelyn.snf.stanford.edu)
59: Shutdown AG4108 2003-03-18 14:40:26: Process Stop (chion.snf.stanford.edu)
60: Re: Shutdown AG4108 2003-03-18 14:40:26: Report Clear for AG4108 (booth.snf.stanford.edu)
61: Shutdown AG4108 2003-03-18 15:18:30: Process Stop (chion.snf.stanford.edu)
62: Re: Shutdown AG4108 2003-03-18 15:18:30: Report Clear for AG4108 (booth.snf.stanford.edu)
63: Comment AG4108 2003-03-24 10:05:10: Report Comment for AG4108 (evelyn.snf.stanford.edu)
64: Comment AG4108 2003-03-24 12:10:06: Report Comment for AG4108 (evelyn.snf.stanford.edu)
65: Re: Problem AG4108 2002-02-20 15:00:12: Report Clear for AG4108 (booth.snf.stanford.edu)
66: Problem AG4108 2003-03-30 20:25:55: Report Problem for AG4108 (mcconnel.snf.stanford.edu)
67: Re: Problem AG4108 2003-03-30 20:25:55: Report Clear for AG4108 (booth.snf.stanford.edu)
68: Shutdown AG4108 2003-04-01 01:32:49: Report Shutdown for AG4108 (mcconnel.snf.stanford.edu)
69: Re: Shutdown AG4108 2003-04-01 01:32:49: Report Clear for AG4108 (booth.snf.stanford.edu)
70: Shutdown AG4108 2003-04-25 11:01:49: Report Shutdown for AG4108 (jawad.snf.stanford.edu)
71: Re: Shutdown AG4108 2003-04-25 11:01:49: Report Clear for AG4108 (booth.snf.stanford.edu)
72: Problem AG4108 2003-05-05 11:32:50: Multiple lamp failure (chion.snf.stanford.edu)
73: Re: Problem AG4108 2003-05-05 11:32:50: Report Clear for AG4108 (booth.snf.stanford.edu)
74: Shutdown AG4108 2003-05-16 10:25:55: Report Shutdown for AG4108 (uli.snf.stanford.edu)
75: Re: Shutdown AG4108 2003-05-16 10:25:55: Report Clear for AG4108 (booth.snf.stanford.edu)
76: Problem AG4108 2003-05-24 11:45:09: Green light not on even enabled in Coral (ychliu.snf.stanford.edu)
77: Re: Problem AG4108 2003-05-24 11:45:09: Report Clear for AG4108 (booth.snf.stanford.edu)
78: Problem AG4108 2003-05-28 16:07:13: Report Problem for AG4108 (ychliu.snf.stanford.edu)
79: Re: Problem AG4108 2003-05-28 16:07:13: Report Clear for AG4108 (booth.snf.stanford.edu)
80: Shutdown AG4108 2003-05-29 14:07:22: Report Shutdown for AG4108 (chion.snf.stanford.edu)
81: Re: Shutdown AG4108 2003-05-29 14:07:22: Report Clear for AG4108 (booth.snf.stanford.edu)
82: Shutdown AG4108 2003-07-18 16:22:49: Report Shutdown for AG4108 (cbaxter.snf.stanford.edu)
83: Re: Shutdown AG4108 2003-07-18 16:22:49: Report Clear for AG4108 (cbaxter.snf.stanford.edu)
84: Problem AG4108 2003-07-26 16:55:33: Out of ammonia (kailash.snf.stanford.edu)
85: Re: Problem AG4108 2003-07-26 16:55:33: Report Clear for AG4108 (booth.snf.stanford.edu)
86: Shutdown AG4108 2003-09-03 23:37:13: Report Shutdown for AG4108 (sjain.snf.stanford.edu)
87: Re: Shutdown AG4108 2003-09-03 23:37:13: Report Clear for AG4108 (booth.snf.stanford.edu)
88: Shutdown AG4108 2003-09-21 20:29:39: Report Shutdown for AG4108 (cmfaulkn.snf.stanford.edu)
89: Re: Shutdown AG4108 2003-09-21 20:29:39: Report Clear for AG4108 (booth.snf.stanford.edu)
90: Problem AG4108 2003-09-25 20:08:57: Report Problem for AG4108 (cmfaulkn.snf.stanford.edu)
91: Problem AG4108 2003-09-25 22:31:36: Particles during N2 anneal (rwoo.snf.stanford.edu)
92: Shutdown AG4108 2003-09-26 08:45:23: Report Shutdown for AG4108 (booth.snf.stanford.edu)
93: Re: Shutdown AG4108 2003-09-26 08:45:23: Report Clear for AG4108 (uli.snf.stanford.edu)
94: Re: Problem AG4108 2003-09-25 22:31:36: Report Clear for AG4108 (uli.snf.stanford.edu)
95: Re: Problem AG4108 2003-09-25 20:08:57: Report Clear for AG4108 (uli.snf.stanford.edu)
96: Problem AG4108 2003-10-01 21:08:05: Report Problem for AG4108 (ychliu.snf.stanford.edu)
97: Re: Problem AG4108 2003-10-01 21:08:05: Report Clear for AG4108 (booth.snf.stanford.edu)
98: Shutdown AG4108 2003-10-06 09:10:14: Report Shutdown for AG4108 (booth.snf.stanford.edu)
99: Re: Shutdown AG4108 2003-10-06 09:10:14: Report Clear for AG4108 (booth.snf.stanford.edu)