Subject: pins: UP vs UP RF From: SangBum Kim <firstname.lastname@example.org>
Date: Sat, 24 Oct 2009 17:08:30 -0700 (PDT)
Does anyone know the difference between 'UP' and 'UP RF' for pin setting? I did not
want to put my wafers directly on hot plate, so I wanted to raise pins up. There are
two options to choose from, 1) 'UP' and 2) 'UP RF', and I don't know the difference...