01: Problem matrix: matrix-I received a no wafer sensed, power down and retrieve wafer error ((none))

02: Shutdown matrix: wafer not sensed in chamber ((none))

03: Shutdown Clear matrix: clearing shutdown ((none))

04: Problem Clear matrix: clearing problem? ((none))

05: Problem matrix: matrix (yiching.snf.stanford.edu)

06: Problem Clear matrix: (booth.snf.stanford.edu)

07: Shutdown matrix: Error: "No wafer sensed in chamber" at end of dummy-wafer run. (sjlee.snf.stanford.edu)

08: Shutdown Clear matrix: removed dropped dummy wafer. (booth.snf.stanford.edu)

09: Shutdown matrix: (true.snf.stanford.edu)

10: Shutdown Clear matrix: remove wafer from chamber (cbaxter.snf.stanford.edu)

11: Shutdown matrix: (zhang.snf.stanford.edu)

12: Shutdown Clear matrix: remove wafer from chamber (cbaxter.snf.stanford.edu)

13: Shutdown matrix: Shutdown - moving machine (booth.snf.stanford.edu)

14: Shutdown Clear matrix: system moved is completed and ready to be use.. (cbaxter.snf.stanford.edu)

15: Shutdown matrix: wafer stuck (true.snf.stanford.edu)

16: Shutdown Clear matrix: removed wafer from chamber (cbaxter.snf.stanford.edu)

17: Problem matrix: System lamp is burned out (beckwith.snf.stanford.edu)

18: Problem Clear matrix: changed burned lamps.. (cbaxter.snf.stanford.edu)

19: Shutdown matrix: wafer in chamber (tbilir.snf.stanford.edu)

20: Problem matrix: wafer in chamber (tbilir.snf.stanford.edu)

21: Problem Clear matrix: Matric dirty wafer out (mcvittie.snf.stanford.edu)

22: Shutdown Clear matrix: dirty wafer out (mcvittie.snf.stanford.edu)

23: Shutdown Clear matrix: Dirty wafer out. jim (mcvittie.snf.stanford.edu)

24: Problem Clear matrix: Dirty wafer out. jim (mcvittie.snf.stanford.edu)

25: Shutdown matrix: wafer not sensed in chamber (tbilir.snf.stanford.edu)

26: Problem matrix: (bchui.snf.stanford.edu)

27: Shutdown Clear matrix: check alignment and its ok (cbaxter.snf.stanford.edu)

28: Problem Clear matrix: (cbaxter.snf.stanford.edu)

29: Problem matrix: green lights are off; not possible to turn them on (pindermu.snf.stanford.edu)

30: Problem Clear matrix: (cbaxter.snf.stanford.edu)

31: Shutdown matrix: wafer lost inside chamber (bchui.snf.stanford.edu)

32: Shutdown Clear matrix: removed wafer and align transport arm (cbaxter.snf.stanford.edu)

33: Shutdown matrix: wafer lost inside (pindermu.snf.stanford.edu)

34: Shutdown Clear matrix: removed wafer.... (cbaxter.snf.stanford.edu)

35: Shutdown matrix: Dead. Will not re-set. (latta.snf.stanford.edu)

36: Shutdown Clear matrix: System reset and wafer cleared .... (shott.snf.stanford.edu)

39: Shutdown matrix: wafer is stuck in chamber (caudillo.snf.stanford.edu)

40: Shutdown Clear matrix: removed wafer from chamber. (booth.snf.stanford.edu)

41: Problem matrix: Prob with loading fork use at your own risk (caudillo.snf.stanford.edu)

42: Shutdown matrix: Wafer stuck inside Pierre (pindermu.snf.stanford.edu)

43: Shutdown Clear matrix: removed wafer & restarted Matrix. (booth.snf.stanford.edu)

44: Problem matrix: system hanged..cannot be reset or turned off (venkat.snf.stanford.edu)

45: Shutdown matrix: system hanged..wafer stuck inside. (venkat.snf.stanford.edu)

46: Problem Clear matrix: User loaded wafer with Resist on backside! (booth.snf.stanford.edu)

47: Re: Shutdown matrix 2000-11-14 02:46:00: system hanged..wafer stuck inside. (latta.snf.stanford.edu)

48: Shutdown matrix 2001-01-02 06:49:17: (booth.snf.stanford.edu)

49: Re: Shutdown matrix 2001-01-02 06:49:17: ac source for heater was unplug... (cbaxter.snf.stanford.edu)

50: Shutdown matrix 2001-02-21 12:18:53: power change over (rcrane.snf.stanford.edu)

51: Comment matrix 2001-02-23 10:04:14: It is now friday morning. An y idea when it will be up??? (lindaw.snf.stanford.edu)

52: Re: Shutdown matrix 2001-02-21 12:18:53: power change over (latta.snf.stanford.edu)

53: Comment matrix 2001-02-23 14:01:36: ran wafers through 4X, still have resist (lindaw.snf.stanford.edu)

54: Comment matrix 2001-02-27 08:14:24: strips standard 3612 just fine in one pass (lindaw.snf.stanford.edu)

55: Problem matrix 2001-03-05 23:51:24: resist not removed (evelyn.snf.stanford.edu)

56: Re: Problem matrix 2001-03-05 23:51:24: resist not removed (cbaxter.snf.stanford.edu)

57: Shutdown matrix 2001-03-15 16:08:26: wafer transport problem (sanli.snf.stanford.edu)

58: Re: Shutdown matrix 2001-03-15 16:08:26: wafer transport problem (cbaxter.snf.stanford.edu)

59: Shutdown matrix 2001-03-16 08:18:25: wafer transport problem (sanli.snf.stanford.edu)

60: Re: Shutdown matrix 2001-03-16 08:18:25: wafer transport problem (vilanova.snf.stanford.edu)

61: Shutdown matrix 2001-03-26 17:53:10: need to cleaned foreline tc not reading right pressure (cbaxter.snf.stanford.edu)

62: Re: Shutdown matrix 2001-03-26 17:53:10: need to cleaned foreline tc not reading right pressure (cbaxter.snf.stanford.edu)

63: Shutdown matrix 2001-04-03 14:56:13: my wafer is stuck inside (sanli.snf.stanford.edu)

64: Re: Shutdown matrix 2001-04-03 14:56:13: my wafer is stuck inside (booth.snf.stanford.edu)

65: Problem matrix 2001-04-12 11:20:23: Not sensing wafers indexing problem (kidonge.snf.stanford.edu)

66: Re: Problem matrix 2001-04-12 11:20:23: Not sensing wafers indexing problem (cbaxter.snf.stanford.edu)

67: Problem matrix 2001-04-26 16:20:52: Chamber pressuer high in Standby Mode (latta.snf.stanford.edu)

68: Re: Problem matrix 2001-04-26 16:20:52: Chamber pressuer high in Standby Mode (booth.snf.stanford.edu)

69: Shutdown matrix 2001-07-24 15:11:54: Wafer fell off chuck during unload... (latta.snf.stanford.edu)

70: Re: Shutdown matrix 2001-07-24 15:11:54: Wafer fell off chuck during unload... (latta.snf.stanford.edu)

71: Problem matrix 2001-08-03 03:32:24: Minor leak .... (shott.snf.stanford.edu)

72: Very minor leak ... (John Shott)

73: Shutdown matrix 2001-08-06 18:38:06: need to fix slow water leak on process cooling water (supply) (cbaxter.snf.stanford.edu)

74: Shutdown matrix 2001-08-06 18:38:19: (cbaxter.snf.stanford.edu)

75: Re: Shutdown matrix 2001-08-06 18:38:19: (cbaxter.snf.stanford.edu)

76: Re: Shutdown matrix 2001-08-06 18:38:06: need to fix slow water leak on process cooling water (supply) (cbaxter.snf.stanford.edu)

77: Re: Problem matrix 2001-08-03 03:32:24: Minor leak .... (cbaxter.snf.stanford.edu)

78: Shutdown matrix 2001-08-25 07:47:19: facility (rcrane.snf.stanford.edu)

79: Re: Shutdown matrix 2001-08-25 07:47:19: facility (rcrane.snf.stanford.edu)

80: Problem matrix 2001-09-24 23:01:45: cannot exit standby mode (true.snf.stanford.edu)

81: Re: Problem matrix 2001-09-24 23:01:45: cannot exit standby mode (cbaxter.snf.stanford.edu)

82: Problem matrix 2001-10-22 11:21:58: system says "dropped wader:`" (crobin.snf.stanford.edu)

83: Re: Problem matrix 2001-10-22 11:21:58: Fixed (hphan.snf.stanford.edu)

84: Problem matrix 2001-10-26 20:35:40: wafer transport problem (daesung.snf.stanford.edu)

85: Re: Problem matrix 2001-10-26 20:35:40: wafer transport problem (cbaxter.snf.stanford.edu)

86: Problem matrix 2001-11-28 14:11:41: matrix dropped wafer (crobin.snf.stanford.edu)

87: Shutdown matrix 2001-11-28 14:12:08: dropped wafer (crobin.snf.stanford.edu)

88: Re: Shutdown matrix 2001-11-28 14:12:08: dropped wafer (cbaxter.snf.stanford.edu)

89: Re: Problem matrix 2001-11-28 14:11:41: matrix dropped wafer (cbaxter.snf.stanford.edu)

90: Shutdown matrix 2001-11-30 12:29:04: 1st wafer stuck going in. (brads.snf.stanford.edu)

91: Re: Shutdown matrix 2001-11-30 12:29:04: 1st wafer stuck going in. (booth.snf.stanford.edu)

92: Shutdown matrix 2001-12-13 22:37:22: lose two wafers in chamber (yyao.snf.stanford.edu)

93: Re: Shutdown matrix 2001-12-13 22:37:22: lose two wafers in chamber (cbaxter.snf.stanford.edu)

94: Problem matrix 2002-01-08 12:58:25: The system is froze,. not responding. (crobin.snf.stanford.edu)

95: Re: Problem matrix 2002-01-08 12:58:25: The system is froze,. not responding. (booth.snf.stanford.edu)

96: Problem matrix 2002-01-18 12:44:19: matrix will not initialize or run (disney.snf.stanford.edu)

97: Shutdown matrix 2002-01-18 13:29:51: matrix not initializing (disney.snf.stanford.edu)

98: Re: Shutdown matrix 2002-01-18 13:29:51: matrix not initializing (cbaxter.snf.stanford.edu)

99: Re: Problem matrix 2002-01-18 12:44:19: matrix will not initialize or run (cbaxter.snf.stanford.edu)