matrix-pcs@snf.stanford.edu: 872: Re: Shutdown matrix SNF 2012-10-01 16:41:02: wafer stuck in chamber

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Subject: Re: Shutdown matrix SNF 2012-10-01 16:41:02: wafer stuck in chamber
From: eenriquez@snf.stanford.edu

Recovered the user's wafer.  Cycled several wafers with no problems.

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