Messages 0xx

01: Amtetcher status (Len Booth)
02: AMT is off shutdown & ready for use. Len (Len Booth)
03: Thick resist (Uma Krishnamoorthy)
04: Re: Thick resist (Jim McVittie)
05: Re: Drytek2 status 8/14/00 (Jim McVittie)
06: CleanUp - A New Matrix Program (Jim McVittie)
07: Modified use of etcher: PLEASE READ! (Nancy Latta)
08: changing recipes (Yiching Liang)
09: Running the AMTetcher W/O the Cryo Pump (Jim McVittie)
10: AMTetcher - cryo is working again. (Len Booth)
11: AMTetcher is up (Len Booth)
12: AMTetcher is down (Len Booth)
13: Amtetcher still down (Len Booth)
14: AMT is up. (Len Booth)
15: AMTetcher scheduled downtime... (Len Booth)
16: AMT is up! (Len Booth)
17: AMTetcher Training Volunteer Needed (Jim McVittie)
18: Problems with Thick Resist in Etchers (Jim McVittie)
19: reservation cancelled (Sanli Ergun)
20: Removed reservation today from 3 to 4:30pm (Pascal Zwahlen)
21: released amtetcher reservation 10:30-2:00 (Brian Joseph Greene)
22: creeping thermal ox. etch rate? (Sharleen Beckwith)
23: removed my 11:00 am reservation... (Sharleen Beckwith)
24: Released AMT etch reservation (Brian Joseph Greene)
25: AMTetcher (Henry Phan)
26: Toxic gas shutdown Aug. 6 (Dick Crane)
27: Toxic gas tests complete (Dick Crane)
28: Down (Cesar Baxter)
29: AMT- back alive (Eric Perozziello)
30: Re: AMT- back alive (Sharleen Beckwith)
31: amtetcher cryo problems (Sharleen Beckwith)
32: Shut down for low bias and rf power. (Dick Crane)
33: Up and running! (Nancy Latta)
34: Etching Rates with AMT (Mohammed H. Badi)
35: Removed AMT reservation today (Brian Joseph Greene)
36: Etch rate results (Nancy Latta)
37: faulty cryo pump readings (Sharleen Beckwith)
38: amt is free...I finished early (Sharleen Beckwith)
39: amt res cancelled... (Sharleen Beckwith)
40: Attn. AMT users (Brian Joseph Greene)
41: Polymer Etchback Program (Nancy Latta)
42: Cancelled res. from 2pm to 4pm (Pascal Zwahlen)
43: reservation removed (Theresa Kramer)
44: Arcing, a reminder (Nancy Latta)
45: Re: Cryo Pump] (Henry Phan)
46: Arcing Problem (Henry Phan)
47: turbo long pump down time (Sharleen Beckwith)
48: removed my reservation for Thursday 11am to 1pm (Zwahlen, Pascal)
49: cancel reservation: 10:00-11:30 Monday (Yahong Yao)
50: reservation cancelled.. (Niranjan Anand Talwalkar)
51: res cancelled today (Goksenin Yaralioglu)
52: Arcing (Henry Phan)
53: Removed my reservation on AMT etcher from 1:30pm to 3pm (Monday) (Zwahlen, Pascal)
54: res. cancelled (Sanli Ergun)
55: gas bottle checks (Ray Seymour)
56: Gas bottle checks (Ray Seymour)
57: etch sidewalls (
58: Arcing Problem (Henry Phan)
59: AMT Dummy (Henry Phan)
60: Cleaning Chamber (Henry Phan)
61: Arcing Problem!!! (Henry Phan)
62: finished early amt is avail. until 3:30 (Sharleen Beckwith)
63: last 3 sign up sheets were put (Sharleen Beckwith)
64: AMTetcher is Shutdown today (Len Booth)
65: AMT Process (Henry Phan)
66: AMT nitride etch rates (Sean T. Hansen)
67: Flashing (Henry Phan)
69: my reservation (Sharleen Beckwith)
70: amt reservation removed (Sharleen Beckwith)
71: res. removed today, 13:00-15:00 (Arif Sanli Ergun)
72: Alarm Button (Henry Phan)
74: Operating Procedure (Henry Phan)
75: :Please... (beckwith.cis.Stanford.EDU)
76: Updated Etch Rate and Operating procedure (Henry Phan)
77: Re: Process Number] (Henry Phan)
78: AMTetcher (Len Booth)
79: canceled reservation (fwd) (Elaheh Sigari)
80: AMT (Henry Phan)
81: res. cancelled today 05/16 (Sanli Ergun)
82: finished early (Sanli Ergun)
83: Reservation time (Henry Phan)
84: amt free this afternoon (Sean T. Hansen)
85: Re: amt free this afternoon (Chi On Chui)
86: cancel (Cesar Baxter)
87: Cancle Reservation (Henry Phan)
88: done early (
89: Cryo Pump Option (Henry Phan)
90: amtetcher res. removed 12:30-13:30 today (Kenneth Brian Crozier)
91: sorry (Arif Sanli Ergun)
92: Available from 8am to noon today, Friday (
93: AMT etcher free from 18:30-20:30 today (Rohit S. Shenoy)
94: res 10a-2p cancelled (Chi On Chui)
95: res. removed 12:00-14:00 (Kris Vossough)
96: free from 4-6pm (Gladys Sarmiento)
97: free until 12:30 (Maurice Stevens)
98: amtetcher available for use (Kim, Han-jun)
99: Experiment to try to reduce arcing (Elmer Enriquez)