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Threads for August 2012
August 2012
[1] Re: Problem mrc SNF 2012-07-25 11:35:52: RF generator
[1] Re: Problem mrc SNF 2012-07-25 14:18:30: Still no RF
[2] Re: Problem mrc SNF 2012-07-31 17:05:23: Foreline pressure burst during roughing
[1] Re: Comment mrc SNF 2012-07-25 11:51:56: My Ar etch recipe works fine.
[1] Re: Comment mrc SNF 2012-07-23 18:30:41: Intermittant Foreline burst during roughing
[1] Comment mrc SNF 2012-08-03 11:06:00: Qual after new RF generator installed
[1] Re: Shutdown mrc SNF 2012-07-25 19:18:42: RF generator is defective
[1] Problem mrc SNF 2012-08-03 18:10:53: Temporary generator installed
[1] Re: Comment mrc SNF 2012-07-19 10:35:16: Do not turn off the white AC switch
[1] Comment mrc SNF 2012-08-06 18:09:28: MRC leak-up much improved. New RF is very good.
[1] Comment mrc SNF 2012-08-10 09:58:35: Temporary Power Supply is Great
[2] Re: Problem mrc SNF 2012-08-11 17:23:10: glass dirty
[2] Re: Shutdown mrc SNF 2012-08-17 16:13:56: System not pumping
[2] Re: Shutdown mrc SNF 2012-08-27 08:20:36: electrode cooling problem
[2] Re: Problem mrc SNF 2012-08-23 16:42:43: Wafer in MRC overheats
[2] Re: Problem mrc SNF 2012-08-14 12:27:41: Sample stage very hot
[2] Re: Problem mrc SNF 2012-08-13 02:43:43: sample hot
[1] Re: Comment mrc SNF 2012-07-23 00:52:00: Comment
[2] Re: Comment mrc SNF 2012-08-02 17:46:50: Update
[2] Re: Comment mrc SNF 2012-08-01 19:07:26: Update RF gen
[2] Re: Comment mrc SNF 2012-08-03 07:44:31: Found chamber leaks
[1] Comment mrc SNF 2012-08-30 10:54:51: Replaced cooling water line
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