Messages 0xx


01: Shutdown mrc: broken water line reported. (booth.snf.stanford.edu)
02: Shutdown Clear mrc: repaired raptured tubing (cbaxter.snf.stanford.edu)
03: Shutdown mrc: (mtang.snf.stanford.edu)
04: Shutdown Clear mrc: heat dp, chamber base @.2M/T. introduce 25sccm of sf6 and pressure control @ 20m/t fine with +/- .2m/t deviation. (cbaxter.snf.stanford.edu)
05: Shutdown mrc: (mtang.snf.stanford.edu)
06: Shutdown Clear mrc: cleaned foreline t/c and top off dp pump w/fomblin oil (cbaxter.snf.stanford.edu)
07: Problem mrc: foreline reading seems higher than normal (lindaw.snf.stanford.edu)
08: Problem Clear mrc: cleaned foreline tc (cbaxter.snf.stanford.edu)
09: Problem mrc: Forline P too HIGH (lindaw.snf.stanford.edu)
10: Problem Clear mrc: changed bad tc on foreline (cbaxter.snf.stanford.edu)
11: Problem mrc: (crichter.snf.stanford.edu)
12: Problem Clear mrc: rf is ok led indicator light is dim (cbaxter.snf.stanford.edu)
13: Problem mrc: Re: mrc (crichter.snf.stanford.edu)
14: Problem Clear mrc: changed light bulbs (cbaxter.snf.stanford.edu)
15: Problem mrc: Chamber has high leak rate.Date: Nov 17, 2000 8:00:57 AM (booth.snf.stanford.edu)
16: Shutdown mrc: leak... (cbaxter.snf.stanford.edu)
17: Problem mrc: Chamber has high leak rate. (booth.snf.stanford.edu)
18: Re: Shutdown mrc 2000-11-21 20:26:43: leak... (cbaxter.snf.stanford.edu)
19: Problem mrc 2001-01-29 11:49:14: Gate valve stuck (bchui.snf.stanford.edu)
20: Re: Problem mrc 2001-01-29 11:49:14: Gate valve stuck (booth.snf.stanford.edu)
21: Problem mrc 2001-01-29 15:55:58: Leak up rate is about 60mT/min (latta.snf.stanford.edu)
22: Re: Problem mrc 2001-01-29 15:55:58: Leak up rate is about 60mT/min (cbaxter.snf.stanford.edu)
23: Problem mrc 2001-01-30 17:48:21: MRC leak (kcheng.snf.stanford.edu)
24: Re: Problem mrc 2001-01-30 17:48:21: MRC leak (cbaxter.snf.stanford.edu)
25: Problem mrc 2001-01-31 10:56:30: (txx.snf.stanford.edu)
26: Shutdown mrc 2001-02-07 21:18:30: quartz is here. will start removing bad quartz on system (cbaxter.snf.stanford.edu)
27: Re: Shutdown mrc 2001-02-07 21:18:30: quartz is here. will start removing bad quartz on system (cbaxter.snf.stanford.edu)
28: Re: Problem mrc 2001-01-31 10:56:30: (cbaxter.snf.stanford.edu)
29: Problem mrc 2001-02-12 16:10:00: foreline TC reading b/t 175 & 200 mT during standby (lindaw.snf.stanford.edu)
30: Shutdown mrc 2001-02-12 18:37:37: need work on tc foreline (cbaxter.snf.stanford.edu)
31: Re: Shutdown mrc 2001-02-12 18:37:37: need work on tc foreline (cbaxter.snf.stanford.edu)
32: Re: Problem mrc 2001-02-12 16:10:00: foreline TC reading b/t 175 & 200 mT during standby (cbaxter.snf.stanford.edu)
33: Shutdown mrc 2001-03-26 17:58:29: foreline tc not reading pressure correctly (cbaxter.snf.stanford.edu)
34: Re: Shutdown mrc 2001-03-26 17:58:29: foreline tc not reading pressure correctly (cbaxter.snf.stanford.edu)
35: Shutdown mrc 2001-04-04 08:50:59: motor went crazy (lindaw.snf.stanford.edu)
36: Re: Shutdown mrc 2001-04-04 08:50:59: motor went crazy (latta.snf.stanford.edu)
37: Problem mrc 2001-04-12 20:43:09: mrc peak voltage meter reads zero (gmclean.snf.stanford.edu)
38: Re: Problem mrc 2001-04-12 20:43:09: mrc peak voltage meter reads zero (cbaxter.snf.stanford.edu)
39: Re: Problem mrc 2001-04-12 20:43:09: mrc peak voltage meter reads zero (Jim McVittie)
40: Problem mrc 2001-04-24 03:28:04: RF power lost (yangxu.snf.stanford.edu)
41: Comment mrc 2001-04-24 11:41:09: rf power is working just fine!!! (lindaw.snf.stanford.edu)
42: Re: Problem mrc 2001-04-24 03:28:04: RF power lost (cbaxter.snf.stanford.edu)
43: Shutdown mrc 2001-04-26 12:31:57: Won't pump below 90mT (latta.snf.stanford.edu)
44: Re: Shutdown mrc 2001-04-26 12:31:57: Won't pump below 90mT (cbaxter.snf.stanford.edu)
45: Shutdown mrc 2001-06-01 16:22:57: need to work leaky pump.. (cbaxter.snf.stanford.edu)
46: Re: Shutdown mrc 2001-06-01 16:22:57: need to work leaky pump.. (cbaxter.snf.stanford.edu)
47: Shutdown mrc 2001-06-04 17:16:57: need to changed pump. leaking oil (cbaxter.snf.stanford.edu)
48: Re: Shutdown mrc 2001-06-04 17:16:57: need to changed pump. leaking oil (cbaxter.snf.stanford.edu)
49: Problem mrc 2001-08-03 18:12:33: (txx.snf.stanford.edu)
50: Re: Problem mrc 2001-08-03 18:12:33: (cbaxter.snf.stanford.edu)
51: Shutdown mrc 2001-08-25 07:47:29: facility (rcrane.snf.stanford.edu)
52: Re: Shutdown mrc 2001-08-25 07:47:29: facility (rcrane.snf.stanford.edu)
53: Comment mrc 2002-01-07 17:06:37: Pressure fluctuation/RF noise (patriciam.snf.stanford.edu)
54: Problem mrc 2002-07-17 02:13:36: No cooling water! (grupp.snf.stanford.edu)
55: Shutdown mrc 2002-07-17 07:31:36: Pump check (mdickey.snf.stanford.edu)
56: Shutdown mrc 2002-07-17 12:53:23: Electrode chiller has failed (booth.snf.stanford.edu)
57: Re: Problem mrc 2002-07-17 02:13:36: No cooling water! (booth.snf.stanford.edu)
58: Re: Shutdown mrc 2002-07-17 07:31:36: Pump check (booth.snf.stanford.edu)
59: Re: Shutdown mrc 2002-07-17 12:53:23: Electrode chiller has failed (booth.snf.stanford.edu)
60: Problem mrc 2002-07-17 15:54:43: No electrode cooling (booth.snf.stanford.edu)
61: Shutdown mrc 2002-07-17 18:51:56: no cooling water (grupp.snf.stanford.edu)
62: Re: Shutdown mrc 2002-07-17 18:51:56: no cooling water (mcvittie.snf.stanford.edu)
63: Shutdown mrc 2002-07-22 09:27:35: Chiller out for repair (booth.snf.stanford.edu)
64: Re: Shutdown mrc 2002-07-22 09:27:35: Chiller out for repair (rcrane.snf.stanford.edu)
65: Re: Problem mrc 2002-07-17 15:54:43: No electrode cooling (cbaxter.snf.stanford.edu)
66: Shutdown mrc 2002-09-18 06:51:36: electrical work in basement (booth.snf.stanford.edu)
67: Re: Shutdown mrc 2002-09-18 06:51:36: electrical work in basement (cbaxter.snf.stanford.edu)
68: Problem mrc 2002-09-26 16:53:50: chip with cured PDMS fell in narrow opening (crichter.snf.stanford.edu)
69: Re: Problem mrc 2002-09-26 16:53:50: chip with cured PDMS fell in narrow opening (cbaxter.snf.stanford.edu)
70: Shutdown mrc 2002-12-03 11:24:43: pressure not stable w/20sccm O2 flowing (booth.snf.stanford.edu)
71: Re: Shutdown mrc 2002-12-03 11:24:43: pressure not stable w/20sccm O2 flowing (cbaxter.snf.stanford.edu)
72: Problem mrc 2003-01-03 16:33:13: MFC#2 giving reading of 0.6sccm when dials are at zero (crichter.snf.stanford.edu)
73: Re: Problem mrc 2003-01-03 16:33:13: MFC#2 giving reading of 0.6sccm when dials are at zero (cbaxter.snf.stanford.edu)
74: Shutdown mrc 2003-01-22 15:57:47: PCW line needs replacing (latta.snf.stanford.edu)
75: Re: Shutdown mrc 2003-01-22 15:57:47: PCW line needs replacing (booth.snf.stanford.edu)
76: Problem mrc 2003-01-30 16:25:16: No voltage after RF power on (chion.snf.stanford.edu)
77: Re: Problem mrc 2003-01-30 16:25:16: No voltage after RF power on (cbaxter.snf.stanford.edu)
78: Problem mrc 2003-01-31 16:10:19: mrc (dchi.snf.stanford.edu)
79: Re: Problem mrc 2003-01-31 16:10:19: mrc (cbaxter.snf.stanford.edu)
80: Problem mrc 2003-04-15 15:10:22: Report Problem for mrc (cshen.snf.stanford.edu)
81: Re: Problem mrc 2003-04-15 15:10:22: Report Clear for mrc (cbaxter.snf.stanford.edu)
82: Problem mrc 2003-04-18 14:54:53: Report Problem for mrc (cshen.snf.stanford.edu)
83: Re: Problem mrc 2003-04-18 14:54:53: Report Clear for mrc (cbaxter.snf.stanford.edu)
84: Problem mrc 2003-04-24 10:59:11: Report Problem for mrc (cshen.snf.stanford.edu)
85: Re: Problem mrc 2003-04-24 10:59:11: Report Clear for mrc (booth.snf.stanford.edu)
86: Shutdown mrc 2003-05-30 18:14:18: Report Shutdown for mrc (cbaxter.snf.stanford.edu)
87: Re: Shutdown mrc 2003-05-30 18:14:18: Report Clear for mrc (cbaxter.snf.stanford.edu)
88: Shutdown mrc 2003-07-24 11:16:57: Report Shutdown for mrc (cbaxter.snf.stanford.edu)
89: Re: Shutdown mrc 2003-07-24 11:16:57: Report Clear for mrc (cbaxter.snf.stanford.edu)
90: Shutdown mrc 2003-08-27 22:25:56: Report Shutdown for mrc (cbaxter.snf.stanford.edu)
91: Re: Shutdown mrc 2003-08-27 22:25:56: Report Clear for mrc (cbaxter.snf.stanford.edu)
92: Shutdown mrc 2003-09-16 09:28:25: Water leak (mislam.snf.stanford.edu)
93: Re: Shutdown mrc 2003-09-16 09:28:25: Report Clear for mrc (cbaxter.snf.stanford.edu)
94: Shutdown mrc 2003-12-19 11:29:33: Holiday Shutdown (rcrane.snf.stanford.edu)
95: Shutdown mrc 2004-01-01 17:29:21: Water leak in MRC ... (shott.snf.stanford.edu)
96: MRC Leak update ... (John Shott)
97: Re: Shutdown mrc 2003-12-19 11:29:33: Holiday Shutdown (latta.snf.stanford.edu)
98: Re: Shutdown mrc 2004-01-01 17:29:21: Water leak in MRC ... (booth.snf.stanford.edu)
99: Problem mrc 2004-01-13 10:05:35: Foreline Vacuum Gauge (ziebarth.snf.stanford.edu)