Messages 0xx


01: Problem amtetcher: Flashing on prg#26 ((none))
02: Problem Clear amtetcher: ((none))
03: Shutdown amtetcher: tray #6 arced at latch (booth.snf.stanford.edu)
04: Shutdown Clear amtetcher: cleaned arc mark om tray. (cbaxter.snf.stanford.edu)
05: Problem amtetcher: Turbo went off. Display lists as not ready, instead of holding at process #2. I silenced the alarm. (frankliu.snf.stanford.edu)
06: Problem Clear amtetcher: restarted turbo pump. (booth.snf.stanford.edu)
07: Shutdown amtetcher: temporary shutdown - back by mid-morning. Len (booth.snf.stanford.edu)
08: Shutdown Clear amtetcher: (booth.snf.stanford.edu)
09: Shutdown amtetcher: maintenence (pcastle.snf.stanford.edu)
10: Shutdown Clear amtetcher: brought back the RF supply relay. (booth.snf.stanford.edu)
11: Problem amtetcher: (crozier.snf.stanford.edu)
12: Problem amtetcher: tray2 bottom wafer - clip broken (crozier.snf.stanford.edu)
13: Shutdown amtetcher: need to replace clip's on tray (cbaxter.snf.stanford.edu)
14: Shutdown Clear amtetcher: changed tray#2 bottom clip (cbaxter.snf.stanford.edu)
15: Problem Clear amtetcher: (cbaxter.snf.stanford.edu)
16: Problem Clear amtetcher: (cbaxter.snf.stanford.edu)
17: Problem amtetcher: Awful sound while tray is rotating (sanli.snf.stanford.edu)
18: Shutdown amtetcher: (cbaxter.snf.stanford.edu)
19: Shutdown Clear amtetcher: (cbaxter.snf.stanford.edu)
20: Problem Clear amtetcher: don't it will cause any problem. i jog the hex cw and ccw , it make that very lite chattering when hex is returning at home position. it look like gear drive need to lube on next wet clean pm. (cbaxter.snf.stanford.edu)
21: Problem amtetcher: wafer clip broke bottom spot 1st panal (phimmer.snf.stanford.edu)
22: Problem amtetcher: Please fix this ASAP. I need it badly. (sanli.snf.stanford.edu)
23: Shutdown amtetcher: Tray#1 wafer clip is broken off. (booth.snf.stanford.edu)
24: Shutdown Clear amtetcher: replaced wafer clip on tray# 1 D. (booth.snf.stanford.edu)
25: Problem Clear amtetcher: cleared. (booth.snf.stanford.edu)
26: Problem Clear amtetcher: cleared. (booth.snf.stanford.edu)
27: Shutdown amtetcher: (beckwith.snf.stanford.edu)
28: Shutdown amtetcher: (latta.snf.stanford.edu)
29: Shutdown Clear amtetcher: (latta.snf.stanford.edu)
30: Shutdown Clear amtetcher: (latta.snf.stanford.edu)
31: Problem amtetcher: vacuum leak, use tweezers to load & unload your wafers until it is repaired. (beckwith.snf.stanford.edu)
32: Problem amtetcher: hex clicks when rotating, sometimes does not seat properly & alarms. (beckwith.snf.stanford.edu)
33: Problem amtetcher: hex makes clicking noise while rotating, sometimes does not seat properly causing the alram to sound. (beckwith.snf.stanford.edu)
34: Problem amtetcher: mfc to gas 3 needs to be zeroed, drifts & get a RO of 1 sometimes. (beckwith.snf.stanford.edu)
35: Problem Clear amtetcher: replaced quartz wand tip, fixed vac hose. (booth.snf.stanford.edu)
36: Problem Clear amtetcher: (booth.snf.stanford.edu)
37: Problem Clear amtetcher: (booth.snf.stanford.edu)
38: Problem Clear amtetcher: low priority. (booth.snf.stanford.edu)
39: Shutdown amtetcher: Water Leak in basement (gaul.snf.stanford.edu)
40: Shutdown Clear amtetcher: MikeR put in new H2O reg in cooling sys. Jim (mcvittie.snf.stanford.edu)
41: Problem amtetcher: hexode motor sticking (hopcroft.snf.stanford.edu)
42: Problem Clear amtetcher: known problem - press the jog button again. (booth.snf.stanford.edu)
43: Problem amtetcher: cold loop at 34c (price.snf.stanford.edu)
44: Problem Clear amtetcher: checked that cold loop set= 19C. (booth.snf.stanford.edu)
45: Shutdown amtetcher: hex won't turn (hopcroft.snf.stanford.edu)
46: Shutdown Clear amtetcher: limited use- tray one only. (latta.snf.stanford.edu)
47: Shutdown amtetcher: Hex will not rotate (price.snf.stanford.edu)
48: Shutdown amtetcher: Cryo Pump (anolley.snf.stanford.edu)
49: Shutdown Clear amtetcher: Ok to run w/o cryo pump. Needed longer pumpdw. 12 min (mcvittie.snf.stanford.edu)
50: Problem amtetcher: Cryo pump still off. Needed longer pumpdw (mcvittie.snf.stanford.edu)
51: Shutdown amtetcher: Leak in foreline bellows. (booth.snf.stanford.edu)
52: Shutdown Clear amtetcher: replaced foreline bellows & reouted. (booth.snf.stanford.edu)
53: Problem Clear amtetcher: cleaned cryo purge valve & it leak checked OK. (booth.snf.stanford.edu)
54: Problem amtetcher: (chcheng.snf.stanford.edu)
55: Problem amtetcher: (jawad.snf.stanford.edu)
56: Shutdown amtetcher: CryoRegen (kalavade.snf.stanford.edu)
57: Shutdown Clear amtetcher: cleaned cryo roughing valve. (booth.snf.stanford.edu)
58: Problem Clear amtetcher: (booth.snf.stanford.edu)
59: Problem Clear amtetcher: (booth.snf.stanford.edu)
60: Problem amtetcher: Cryopump not working-OK to use w/o cryopump (booth.snf.stanford.edu)
61: Problem Clear amtetcher: Cryopump working again - use cryopump step in all recipes again, as normal. (booth.snf.stanford.edu)
62: Problem amtetcher: (davehong.snf.stanford.edu)
63: Shutdown amtetcher: No Hex Flow - cooling water failed. (booth.snf.stanford.edu)
64: Shutdown Clear amtetcher: replaced cooling water pump. (booth.snf.stanford.edu)
65: Problem Clear amtetcher: (booth.snf.stanford.edu)
66: Shutdown amtetcher: Shutdown for repair of hex rotation. (booth.snf.stanford.edu)
67: Shutdown Clear amtetcher: Hexode rotation is working again. (booth.snf.stanford.edu)
68: Shutdown amtetcher 2001-01-03 12:20:03: Arcing (latta.snf.stanford.edu)
69: Re: Shutdown amtetcher 2001-01-03 12:20:03: Amtetcher is UP! (booth.snf.stanford.edu)
70: Problem amtetcher 2001-01-08 09:28:47: Bell Jar not responding to close (jennifer.snf.stanford.edu)
71: Re: Problem amtetcher 2001-01-08 09:28:47: Bell Jar not responding to close (booth.snf.stanford.edu)
72: Problem amtetcher 2001-01-23 22:16:27: program 24 has warm step on (cool step off). (ejwong.snf.stanford.edu)
73: Re: Problem amtetcher 2001-01-23 22:16:27: program 24 has warm step on (cool step off). (booth.snf.stanford.edu)
74: Problem amtetcher 2001-01-24 13:11:49: Arcing!!! (ukris.snf.stanford.edu)
75: Re: Problem amtetcher 2001-01-24 13:11:49: Arcing!!! (booth.snf.stanford.edu)
76: Shutdown amtetcher 2001-01-25 07:45:52: Need to repair arcing at latch on tray #1. (booth.snf.stanford.edu)
77: Re: Shutdown amtetcher 2001-01-25 07:45:52: Need to repair arcing at latch on tray #1. (booth.snf.stanford.edu)
78: Problem amtetcher 2001-01-26 11:23:57: AMTetcher (kcheng.snf.stanford.edu)
79: Problem amtetcher 2001-01-26 11:33:32: AMTetcher (kcheng.snf.stanford.edu)
80: Re: Problem amtetcher 2001-01-26 11:33:32: AMTetcher (booth.snf.stanford.edu)
81: Re: Problem amtetcher 2001-01-26 11:23:57: AMTetcher (booth.snf.stanford.edu)
82: Shutdown amtetcher 2001-02-06 19:37:53: cryo on regen (cbaxter.snf.stanford.edu)
83: Re: Shutdown amtetcher 2001-02-06 19:37:53: cryo on regen (latta.snf.stanford.edu)
84: Problem amtetcher 2001-02-13 11:52:20: 3 things (beckwith.snf.stanford.edu)
85: Re: Problem amtetcher 2001-02-13 11:52:20: 3 things (booth.snf.stanford.edu)
86: Problem amtetcher 2001-02-14 11:39:47: load complete light does not go off... (beckwith.snf.stanford.edu)
87: Re: Problem amtetcher 2001-02-14 11:39:47: load complete light does not go off... (booth.snf.stanford.edu)
88: Problem amtetcher 2001-02-22 12:17:05: I stupidly stopped cryo regen (latta.snf.stanford.edu)
89: Shutdown amtetcher 2001-02-22 20:29:53: started cryo regen again. now cooling down. (cbaxter.snf.stanford.edu)
90: Re: Shutdown amtetcher 2001-02-22 20:29:53: started cryo regen again. now cooling down. (latta.snf.stanford.edu)
91: Re: Problem amtetcher 2001-02-22 12:17:05: I stupidly stopped cryo regen (latta.snf.stanford.edu)
92: Problem amtetcher 2001-03-13 10:37:49: Vacuum wand not working (anolley.snf.stanford.edu)
93: Re: Problem amtetcher 2001-03-13 10:37:49: Vacuum wand not working (booth.snf.stanford.edu)
94: Problem amtetcher 2001-03-16 08:29:01: amt etcher stack pum leak (davehong.snf.stanford.edu)
95: Shutdown amtetcher 2001-03-16 08:30:37: AMT is down (davehong.snf.stanford.edu)
96: Re: Shutdown amtetcher 2001-03-16 08:30:37: AMT is down (latta.snf.stanford.edu)
97: Re: Problem amtetcher 2001-03-16 08:29:01: amt etcher stack pum leak (latta.snf.stanford.edu)
98: Shutdown amtetcher 2001-03-16 16:03:26: Shutdw to test gas in cooling water (mcvittie.snf.stanford.edu)
99: Re: Shutdown amtetcher 2001-03-16 16:03:26: Shutdw to test gas in cooling water (booth.snf.stanford.edu)