Messages 30xx


00: Problem amtetcher SNF 2012-07-23 20:41:36: Residue in chamber and on wafers (levi.snf.stanford.edu)
01: Comment amtetcher SNF 2012-07-24 07:26:54: Base plate (mdickey.snf.stanford.edu)
02: Re: Problem amtetcher SNF 2012-07-23 20:41:36: Residue in chamber and on wafers (eenriquez.snf.stanford.edu)
03: Comment amtetcher SNF 2012-07-30 19:16:15: Prog3 oxide etch rate 250nm/min (xzhuan1.snf.stanford.edu)
04: Re: Comment amtetcher SNF 2012-07-30 19:16:15: Prog3 oxide etch rate 250nm/min (latta.snf.stanford.edu)
05: Comment amtetcher SNF 2012-07-31 11:51:10: Qucik ck after user comment (latta.snf.stanford.edu)
06: Comment amtetcher SNF 2012-08-01 08:41:45: oil (mdickey.snf.stanford.edu)
07: Problem amtetcher SNF 2012-08-17 15:12:03: strange error message (xuanwu.snf.stanford.edu)
08: Shutdown amtetcher SNF 2012-08-17 16:24:18: no cooling water (eenriquez.snf.stanford.edu)
09: Re: Shutdown amtetcher SNF 2012-08-17 16:24:18: no cooling water (cbaxter.snf.stanford.edu)
10: Re: Problem amtetcher SNF 2012-08-17 15:12:03: strange error message (cbaxter.snf.stanford.edu)
11: Problem amtetcher SNF 2012-08-26 00:14:00: hexode 21 deg c+ ? (jaehlee.snf.stanford.edu)
12: Comment amtetcher SNF 2012-08-26 00:36:41: please ignore my previous report for the problem (jaehlee.snf.stanford.edu)
13: Re: Problem amtetcher SNF 2012-08-26 00:14:00: hexode 21 deg c+ ? (cbaxter.snf.stanford.edu)
14: Problem amtetcher SNF 2012-09-02 10:37:15: broken (maxms.snf.stanford.edu)
15: Shutdown amtetcher SNF 2012-09-02 18:14:01: Update (cbaxter.snf.stanford.edu)
16: Comment amtetcher SNF 2012-09-04 14:25:06: Update (eenriquez.snf.stanford.edu)
17: Comment amtetcher SNF 2012-09-05 12:18:04: Update (eenriquez.snf.stanford.edu)
18: Comment amtetcher SNF 2012-09-11 12:09:40: Update (eenriquez.snf.stanford.edu)
19: Re: Shutdown amtetcher SNF 2012-09-02 18:14:01: Update (eenriquez.snf.stanford.edu)
20: Re: Problem amtetcher SNF 2012-09-02 10:37:15: broken (eenriquez.snf.stanford.edu)
21: Re: Comment amtetcher SNF 2012-08-01 08:41:45: oil (eenriquez.snf.stanford.edu)
22: Re: Comment amtetcher SNF 2012-08-26 00:36:41: please ignore my previous report for the problem (eenriquez.snf.stanford.edu)
23: Re: Comment amtetcher SNF 2012-09-04 14:25:06: Update (eenriquez.snf.stanford.edu)
24: Re: Comment amtetcher SNF 2012-09-05 12:18:04: Update (eenriquez.snf.stanford.edu)
25: Re: Comment amtetcher SNF 2012-09-11 12:09:40: Update (eenriquez.snf.stanford.edu)
26: Problem amtetcher SNF 2012-09-13 09:36:50: Process Error (chienyuc.snf.stanford.edu)
27: Shutdown amtetcher SNF 2012-09-13 09:56:09: shutdown (mdickey.snf.stanford.edu)
28: Re: Shutdown amtetcher SNF 2012-09-13 09:56:09: shutdown (eenriquez.snf.stanford.edu)
29: Re: Problem amtetcher SNF 2012-09-13 09:36:50: Process Error (cbaxter.snf.stanford.edu)
30: Comment amtetcher SNF 2012-09-14 23:45:16: (yjhuo.snf.stanford.edu)
31: Comment amtetcher SNF 2012-09-14 23:52:26: Hexode temperature (yjhuo.snf.stanford.edu)
32: Shutdown amtetcher SNF 2012-09-20 12:14:34: Error: Cryo pump leakage (wtzhao.snf.stanford.edu)
33: Re: Shutdown amtetcher SNF 2012-09-20 12:14:34: Error: Cryo pump leakage (mdickey.snf.stanford.edu)
34: Shutdown amtetcher SNF 2012-09-20 17:34:04: High vaccum leak (daesung.snf.stanford.edu)
35: Re: Shutdown amtetcher SNF 2012-09-20 17:34:04: High vaccum leak (cbaxter.snf.stanford.edu)
36: Problem amtetcher SNF 2012-09-25 19:57:36: program 3 is not correct (mtan.snf.stanford.edu)
37: Re: Problem amtetcher SNF 2012-09-25 19:57:36: program 3 is not correct (eenriquez.snf.stanford.edu)
38: Shutdown amtetcher SNF 2012-09-26 17:29:05: Low Bias, arching (ludwig.snf.stanford.edu)
39: Re: Shutdown amtetcher SNF 2012-09-26 17:29:05: Low Bias, arching (eenriquez.snf.stanford.edu)
40: Comment amtetcher SNF 2012-09-27 22:54:29: oxide etch rate (cachang.snf.stanford.edu)
41: Problem amtetcher SNF 2012-09-27 22:55:03: vacuum wand not working (cachang.snf.stanford.edu)
42: Re: Problem amtetcher SNF 2012-09-27 22:55:03: vacuum wand not working (mdickey.snf.stanford.edu)
43: Comment amtetcher SNF 2012-10-23 14:58:36: 1 broken clamp (jparker.snf.stanford.edu)
44: Re: Comment amtetcher SNF 2012-10-23 14:58:36: 1 broken clamp (mdickey.snf.stanford.edu)
45: Re: Comment amtetcher SNF 2012-04-27 09:03:34: Hexode temperature (eenriquez.snf.stanford.edu)
46: Re: Comment amtetcher SNF 2012-04-27 14:51:51: Quick check after warm loop turned off (eenriquez.snf.stanford.edu)
47: Re: Comment amtetcher SNF 2012-07-24 07:26:54: Base plate (eenriquez.snf.stanford.edu)
48: Re: Comment amtetcher SNF 2012-09-14 23:45:16: (eenriquez.snf.stanford.edu)
49: Re: Comment amtetcher SNF 2012-09-14 23:52:26: Hexode temperature (eenriquez.snf.stanford.edu)
50: Problem amtetcher SNF 2012-10-27 07:18:32: VENT problem (itot.snf.stanford.edu)
51: Problem amtetcher SNF 2012-10-27 07:35:41: cancel my problem (itot.snf.stanford.edu)
52: Re: Problem amtetcher SNF 2012-10-27 07:18:32: VENT problem (eenriquez.snf.stanford.edu)
53: Re: Problem amtetcher SNF 2012-10-27 07:35:41: cancel my problem (eenriquez.snf.stanford.edu)
54: Problem amtetcher SNF 2012-10-30 00:35:16: system not responsive (zzp.snf.stanford.edu)
55: Shutdown amtetcher SNF 2012-10-30 00:52:05: SYSTEM ERROR RS 2002 EB EF ED (junam.snf.stanford.edu)
56: Re: Shutdown amtetcher SNF 2012-10-30 00:52:05: SYSTEM ERROR RS 2002 EB EF ED (eenriquez.snf.stanford.edu)
57: Re: Problem amtetcher SNF 2012-10-30 00:35:16: system not responsive (eenriquez.snf.stanford.edu)
58: Comment amtetcher SNF 2012-11-02 17:55:45: Turbo Pump (cbaxter.snf.stanford.edu)
59: Shutdown amtetcher SNF 2012-11-05 17:14:57: Display shows "system error" (bchui.snf.stanford.edu)
60: Re: Shutdown amtetcher SNF 2012-11-05 17:14:57: Display shows "system error" (mdickey.snf.stanford.edu)
61: Re: Comment amtetcher SNF 2012-11-02 17:55:45: Turbo Pump (eenriquez.snf.stanford.edu)
62: Comment amtetcher SNF 2012-11-07 17:35:45: Comment (eenriquez.snf.stanford.edu)
63: Problem amtetcher SNF 2012-11-15 16:41:00: some dummy wafers look thin and dirty (xzhuan1.snf.stanford.edu)
64: Re: Problem amtetcher SNF 2012-11-15 16:41:00: some dummy wafers look thin and dirty (cbaxter.snf.stanford.edu)
65: Comment amtetcher SNF 2012-11-26 16:12:42: Oxide etch rate not uniform (cachang.snf.stanford.edu)
66: Shutdown amtetcher SNF 2012-11-30 07:35:00: pump (mdickey.snf.stanford.edu)
67: Comment amtetcher SNF 2012-11-30 14:49:31: Update (eenriquez.snf.stanford.edu)
68: Re: Shutdown amtetcher SNF 2012-11-30 07:35:00: pump (cbaxter.snf.stanford.edu)
69: Shutdown amtetcher SNF 2012-11-30 16:44:18: System faulting for pump stack leak.. (cbaxter.snf.stanford.edu)
70: Re: Comment amtetcher SNF 2012-11-30 14:49:31: Update (cbaxter.snf.stanford.edu)
71: Comment amtetcher SNF 2012-12-02 14:40:34: Update (cbaxter.snf.stanford.edu)
72: Re: Shutdown amtetcher SNF 2012-11-30 16:44:18: System faulting for pump stack leak.. (cbaxter.snf.stanford.edu)
73: Problem amtetcher SNF 2012-12-03 16:57:27: To monitor (cbaxter.snf.stanford.edu)
74: Comment amtetcher SNF 2012-12-03 18:37:40: display said "Warming Hexode" (bchui.snf.stanford.edu)
75: Re: Comment amtetcher SNF 2012-12-03 18:37:40: display said "Warming Hexode" (cbaxter.snf.stanford.edu)
76: Re: Comment amtetcher SNF 2012-12-02 14:40:34: Update (eenriquez.snf.stanford.edu)
77: Re: Problem amtetcher SNF 2012-12-03 16:57:27: To monitor (eenriquez.snf.stanford.edu)
78: Problem amtetcher SNF 2012-12-04 14:25:20: Vent timed out error (sclaussen.snf.stanford.edu)
79: Comment amtetcher SNF 2012-12-04 15:51:01: Oxide etch rate (sclaussen.snf.stanford.edu)
80: Re: Problem amtetcher SNF 2012-12-04 14:25:20: Vent timed out error (cbaxter.snf.stanford.edu)
81: Shutdown amtetcher SNF 2012-12-05 08:22:35: System software crashed (eenriquez.snf.stanford.edu)
82: Comment amtetcher SNF 2012-12-05 10:31:06: FL1 error (sclaussen.snf.stanford.edu)
83: Re: Shutdown amtetcher SNF 2012-12-05 08:22:35: System software crashed (eenriquez.snf.stanford.edu)
84: Problem amtetcher SNF 2012-12-06 13:33:23: FL1 error (sclaussen.snf.stanford.edu)
85: Re: Problem amtetcher SNF 2012-12-06 13:33:23: FL1 error (eenriquez.snf.stanford.edu)
86: Re: Comment amtetcher SNF 2012-12-05 10:31:06: FL1 error (eenriquez.snf.stanford.edu)
87: Comment amtetcher SNF 2012-12-10 14:25:12: Oxide etch rate fluctuations (sclaussen.snf.stanford.edu)
88: Comment amtetcher SNF 2012-12-10 14:25:34: FL1 error (sclaussen.snf.stanford.edu)
89: Comment amtetcher SNF 2012-12-11 11:37:47: FL1 Error (karthikv.snf.stanford.edu)
90: Comment amtetcher SNF 2012-12-11 17:54:25: FL1 error (xuanwu.snf.stanford.edu)
91: Problem amtetcher SNF 2012-12-12 13:21:12: Flow 1 out limit (cachang.snf.stanford.edu)
92: Comment amtetcher SNF 2012-12-12 14:28:47: oxide etch rate (cachang.snf.stanford.edu)
93: Problem amtetcher SNF 2012-12-12 15:27:11: Low silicon etch rate on recipe 4 ... (shott.snf.stanford.edu)
94: Re: Comment amtetcher SNF 2012-12-10 14:25:34: FL1 error (latta.snf.stanford.edu)
95: Re: Comment amtetcher SNF 2012-12-11 11:37:47: FL1 Error (latta.snf.stanford.edu)
96: Re: Comment amtetcher SNF 2012-12-11 17:54:25: FL1 error (latta.snf.stanford.edu)
97: Re: Problem amtetcher SNF 2012-12-12 13:21:12: Flow 1 out limit (latta.snf.stanford.edu)
98: Problem amtetcher SNF 2012-12-15 17:33:00: flow 1 out limit error (popomoo.snf.stanford.edu)
99: Re: Problem amtetcher SNF 2012-12-15 17:33:00: flow 1 out limit error (cbaxter.snf.stanford.edu)