Subject: Comment amtetcher SNF 2012-09-14 23:52:26: Hexode temperature
From: yjhuo@snf.stanford.edu

During the process running, the Hexode cooling step is continuing even after 30 mins.
The Hexode temperature reading is 23 dC. So I aborted the etching process at the end.
System is under process 2 standby program. Not sure if it will run properly or not.
 
Sorry for all the troubles.