amtetcher-pcs@snf.stanford.edu: 3040: Comment amtetcher SNF 2012-09-27 22:54:29: oxide etch rate

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Subject: Comment amtetcher SNF 2012-09-27 22:54:29: oxide etch rate
From: cachang@snf.stanford.edu

program 3 for 25mins, etch rate = 308A/min
0.7um PR etch rate = 63.4A/min

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