amtetcher-pcs@snf.stanford.edu: 3079: Comment amtetcher SNF 2012-12-04 15:51:01: Oxide etch rate

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Subject: Comment amtetcher SNF 2012-12-04 15:51:01: Oxide etch rate
From: sclaussen@snf.stanford.edu

Etch rate of densified LTO (which usually etches similarly to thermal oxide) was ~30.0
nm/min.

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