Msg by: [<- thread ->] [<- time ->] [<- author ->] | [Threads] [SNF Home] [SNF Archive Home] [Email Msg] [Email Thread] [Subscribe To List] [List FAQ]
Subject: Comment amtetcher SNF 2012-12-10 14:25:12: Oxide etch rate fluctuations
From: sclaussen@snf.stanford.edu 
Measured an etch rate of 26 nm/min for dens. LTO in my first etch, then later in a second
etch it rose to about 29 nm/min.
Msg by: [<- thread ->] [<- time ->] [<- author ->] | [Threads] [SNF Home] [SNF Archive Home] [Email Msg] [Email Thread] [Subscribe To List] [List FAQ]