Messages 0xx
01:
Re: post HBr rinse (fwd)
(
Nancy Latta)
02:
Out of BCL3
(
Jim McVittie)
03:
Nitride etch rates?
(
Nancy Latta)
04:
The P5000 is available for use.
(
Len Booth)
05:
No More Dummy Wafers to be Provided
(
Jim McVittie)
06:
Out of HBr
(
Jim McVittie)
07:
Out of HBr
(
Jim McVittie)
08:
gas availability
(
Len Booth)
09:
removed my reservation from 2 to 4pm today!
(
Chi On Chui)
10:
HBr gas
(
Dick Crane)
11:
HBr
(
Dick Crane)
12:
HBr
(
Ray Seymour)
13:
Problems with Thick Resist in Etchers
(
Jim McVittie)
14:
Unstable pressure at CHB
(
Song Pang)
15:
P5000 Ch C Silicon etch status
(
Len Booth)
16:
Wafer Sequence on P5000
(
Len Booth)
17:
Toxic gas shutdown Aug. 6
(
Dick Crane)
18:
Toxic gas tests complete
(
Dick Crane)
19:
Etcher reserved all tomorrow (8/22)
(
Nancy Latta)
20:
Done!
(
Nancy Latta)
21:
HBr gas is not available at this time.
(
Len Booth)
22:
HBr is available again
(
Len Booth)
23:
HBR status
(
ray seymour)
24:
CH.A Timed program
(
Randy True)
25:
Re: CH.A Timed program
(
Nancy Latta)
26:
Re: CH.A Timed program
(
Song Pang)
27:
Re: CH.A Timed program
(
Song Pang)
28:
P5000 recipes
(
Len Booth)
29:
etch logs and season wafers
(
Randy True)
30:
P5000etch Ch.B oxide etch is down
(
Len Booth)
31:
Chamber B parts
(
Len Booth)
32:
P5000etch Oxide chamber
(
Len Booth)
33:
Reservation limits
(
Nancy Latta)
34:
Arcing Problem
(
Jim McVittie)
35:
P5000 Logbook
(
Jim McVittie)
36:
Contamination Tests in P5000 Chamber A
(
Jim McVittie)
37:
Gas bottle checks
(
Ray Seymour)
38:
finished early, 4pm
(
garyyamanet.netscape.net)
39:
Procedure for Eliminating Grass During Si Trench Etch
(
Jim McVittie)
40:
one day shutdown
(
Len Booth)
41:
won't need 22:00-24:00 tonight
(
Rob Norris Candler)
42:
P5000etch Shutdown
(
Len Booth)
43:
Reservation restrictions
(
Nancy Latta)
44:
Re: Wafer in Finger Prints in p5000etch]
(
Jim McVittie)
45:
P5000 available from 13:30 to 15:00 5/20
(
Takahisa Kato)
46:
p5000 free from 20:30~22:30
(
Woo-Tae Park)
47:
Re: p5000 free from 20:30~22:30
(
Gary Yama)
48:
P5000 available from 10:30 to 12:30 5/29
(
Takahisa Kato)
49:
p5000 available from 3:30 till 5:30 pm
(
Kim, Han-jun)
50:
Bashar's Reservation Cancelled for 6/11/03
(
Shabbir A. Bashar, Ph.D.)
51:
Question about Silicon Dry Etch
(
Shabbir A. Bashar, Ph.D.)
52:
P5000etch Ch.C is ready
(
Len Booth)
53:
Chamber C Wafer Sticking Problem Poll
(
Jim McVittie)
54:
Re: Chamber C Wafer Sticking Problem Poll
(
Shabbir A. Bashar, Ph.D.)
55:
Re: Chamber C Wafer Sticking Problem Poll
(
Jim McVittie)
56:
Re: Chamber C Wafer Sticking Problem Poll
(
Shabbir A. Bashar, Ph.D.)
57:
P5000etch Chamber C recipes
(
Len Booth)
58:
p5000 13:00-14:30 free
(
Onur KILIC)
59:
Ch-C ok to use
(
Cesar Baxter)
60:
done early, P5000 free now
(
Rob Norris Candler)
61:
P5000etch Ch A status Dec 10
(
Len Booth)
62:
how to process double polished wafer in P5000?
(
Zhengyu Wang)
63:
P5000etch is available for use
(
Han Jun Kim)
64:
Ch.A etch rates and selectivity
(
Rohit Sudhir Shenoy)
65:
cancelled reservation from 7:30pm-10pm
(
Rohit Sudhir Shenoy)
66:
machine available from 1-6 PM, wafer not ready
(
ben.jian)
67:
p5000 is available from 11 am
(
Kim, Han-jun)
68:
finished early. releasing time 6PM ~ midnight
(
Woo-Tae Park)
69:
Chlorine and BCl3 gas cylinder change
(
Elmer Enriquez)
70:
Did not make it to my 9am reservation, please use. Thanks, Ignacio
(
Ignacio A. Zuleta)
71:
Re: Cancelled Reservation today from 2pm-4pm
(
C. Richter)
72:
chamber C qeustion
(
Ilya Fushman)
73:
Re: chamber C qeustion
(
Jim McVittie)
74:
Characterized recipes on the p5000?
(
Chuck)
75:
Residue Dots after Aluminum Etch
(
Ching-Hsiang Cheng)
76:
Will not make 11:30 tool time
(
Brewer, Rhett T)
77:
backside protection?
(
Ankur Jain)
78:
HBR leak- Poly etch not available.
(
Nancy Latta)
79:
Status of HBr gas for poly etch
(
Dick Crane)
80:
HBr gas status
(
Dick Crane)
81:
HBr is back on-line
(
Dick Crane)
82:
p5000 free from 16:00-18:00 today
(
Evelyn Wang)
83:
p5000 Reservation Cancelled
(
Jinendra Raja Jain)
84:
Undercutting of 2um wide 1um thick wires
(
Ching-Hsiang Cheng)
85:
Re: Undercutting of 2um wide 1um thick wires
(
Jim McVittie)
86:
PLEASE PLEASE help with STS etcher footing problem
(
Elvis Der-Song Lin)
87:
Re: PLEASE PLEASE help with STS etcher footing problem
(
Alissa M. Fitzgerald)
88:
HBr panel replacement
(
Elmer Enriquez)
89:
Re: HBr panel replacement
(
Elmer Enriquez)
90:
Etch rates of PMMA and Oxide
(
Maria Makarova)
91:
looking for help with Ti/Al etching in P5000
(
Elvis Der-Song Lin)
92:
NF3 gas cylinder change notice
(
Elmer Enriquez)
93:
p5000etch reservation released now to 2pm (not ready yet)
(
Bongsang Kim)
94:
reservations removed
(
Robin King)
95:
etching SiO2 in deep trenches
(
Huang Kevin)
96:
oxide etching anisotropy
(
Huang Kevin)
97:
P5000etch is available for use
(
Kim, Han-Jun)
98:
is P5000 not usable now?
(
Huang Kevin)
99:
p5000 Reservation removed - Sun 17:00-19:30
(
Renata Melamud)