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Threads for August 2012
August 2012
[2] Re: Problem p5000etch SNF 2012-08-04 10:17:36: ch b - unstable pressure
[2] Re: Problem p5000etch SNF 2012-08-03 18:41:58: Ch. B Unstable Chamber Pressure
[2] Re: Comment p5000etch SNF 2012-08-03 18:38:12: Ch. B Unstable Chamber Pressure
[2] Re: Problem p5000etch SNF 2012-08-15 16:52:14: Ch. C Turbo "Slow"
[2] Re: Shutdown p5000etch SNF 2012-08-17 13:00:12: wafer stuck between elevator and cassette
[2] Re: Problem p5000etch SNF 2012-08-16 13:48:46: Ch.B pressure not stable
[2] Re: Shutdown p5000etch SNF 2012-08-17 16:14:22: No I/O communication
[2] Re: Problem p5000etch SNF 2012-08-20 09:25:09: Ch.B is down vacuum pump
[2] Re: Problem p5000etch SNF 2012-08-20 16:40:54: Ch.A, wafer enters chamber but no process
[2] Re: Problem p5000etch SNF 2012-08-21 06:16:22: Chamber C detected HT EX fault
[2] Re: Problem p5000etch SNF 2012-08-22 01:41:15: chamber B clamp
[2] Re: Shutdown p5000etch SNF 2012-08-23 08:42:38: chamber B
[2] Re: Problem p5000etch SNF 2012-08-22 18:00:36: same problem as yesterday... : Ch B clamp issue
[2] Re: Problem p5000etch SNF 2012-08-30 08:44:56: Ch C turbo is off
[1] Shutdown p5000etch SNF 2012-08-31 16:25:34: wafer dropped in load lock
[1] Comment p5000etch SNF 2012-08-31 16:34:51: managed to retrieve wafer.
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