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Threads for November 2012
November 2012
[1] Comment p5000etch SNF 2012-11-04 08:42:20: Robot Cal
[2] Re: Shutdown p5000etch SNF 2012-11-06 09:02:09: EMO activated
[2] Re: Problem p5000etch SNF 2012-11-09 20:07:47: root directory full and stopped
[1] Comment p5000etch SNF 2012-11-11 07:58:24: Chamber's l/r
[1] Comment p5000etch SNF 2012-11-13 10:00:39: CF4
[2] Re: Problem p5000etch SNF 2012-11-15 18:44:10: Endpoint stepper B calibration failed
[2] Re: Problem p5000etch SNF 2012-11-13 08:37:18: CF4
[1] Comment p5000etch SNF 2012-11-20 11:18:26: Ch B Oxide resist etch rate seems high
[1] Comment p5000etch SNF 2012-11-21 20:56:17: Ch B. rates
[2] Re: Problem p5000etch SNF 2012-11-21 15:37:45: High Resist etch rate
[1] Comment p5000etch SNF 2012-11-24 21:56:43: Found Ch. B offline
[2] Re: Problem p5000etch SNF 2012-11-27 14:22:55: High He flow, 29.4sccm
[2] Re: Comment p5000etch SNF 2012-11-15 09:34:10: Ch A High backside He
[2] Re: Problem p5000etch SNF 2012-11-27 19:03:34: Ch.B OXIDE ISO etch acts strangely
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