Messages 0xx


01: Shutdown p5000etch: Wafer did not drop down on blade from Chamber A. 4 wafers are still inside ((none))
02: Shutdown Clear p5000etch: Wafer cleared. ((none))
03: Shutdown p5000etch: Wafer did not drop on the arm from Chamber B ((none))
04: Shutdown Clear p5000etch: ((none))
05: Shutdown p5000etch: System repeatedly mishandling wafers ((none))
06: Shutdown Clear p5000etch: system ready for conditioning (cbaxter.snf.stanford.edu)
07: Shutdown p5000etch: wafer stuck in chamber B (yiching.snf.stanford.edu)
08: Shutdown Clear p5000etch: Clear: removed wafer from Ch. B oxide. (booth.snf.stanford.edu)
09: Shutdown p5000etch: shutdown for chamabr C wet clean.. (cbaxter.snf.stanford.edu)
10: Shutdown Clear p5000etch: cha. C wet clean completed. cha. will need conditioning before ranning any process. (cbaxter.snf.stanford.edu)
11: Shutdown p5000etch: wafer stuck in chamber c (true.snf.stanford.edu)
12: Shutdown Clear p5000etch: removed wafers fr cha. c (cbaxter.snf.stanford.edu)
13: Shutdown p5000etch: wafer stuck in ch B (true.snf.stanford.edu)
14: Shutdown Clear p5000etch: Shutdown cleared (shott.snf.stanford.edu)
15: Shutdown p5000etch: (manjot.snf.stanford.edu)
16: Shutdown Clear p5000etch: P5000 Cham D wafer out (mcvittie.snf.stanford.edu)
17: Shutdown Clear p5000etch: p5000 Cham D wafer out (mcvittie.snf.stanford.edu)
18: Problem p5000etch: Ch D Slit Door Flaps (true.snf.stanford.edu)
19: Shutdown p5000etch: wafer stuck in ch. b (true.snf.stanford.edu)
20: Shutdown Clear p5000etch: removed wafer from chamber (cbaxter.snf.stanford.edu)
21: Problem Clear p5000etch: changed actuator (cbaxter.snf.stanford.edu)
22: Shutdown p5000etch: p5000 wafer stuck in elevator (dinkar.snf.stanford.edu)
23: Shutdown Clear p5000etch: Removed Wafer from loadlock jim (mcvittie.snf.stanford.edu)
24: Shutdown p5000etch: need to put oil in pump. (booth.snf.stanford.edu)
25: Shutdown Clear p5000etch: recycled B pump oil. (booth.snf.stanford.edu)
33: Problem p5000etch: possible water problem (king.snf.stanford.edu)
34: Problem p5000etch: Gryphon Argon MFC (king.snf.stanford.edu)
35: Shutdown Clear p5000etch: changed contactor. heater is @setpoint (cbaxter.snf.stanford.edu)
36: Problem Clear p5000etch: changed contactor (cbaxter.snf.stanford.edu)
37: Problem Clear p5000etch: wafers removed (cbaxter.snf.stanford.edu)
38: Problem Clear p5000etch: (cbaxter.snf.stanford.edu)
39: Problem p5000etch: (manjot.snf.stanford.edu)
40: Problem Clear p5000etch: (cbaxter.snf.stanford.edu)
41: Problem p5000etch: ChamberD vane pump needs repair. (booth.snf.stanford.edu)
42: Shutdown p5000etch: load lock won't ventDate: Nov 17, 2000 6:54:18 PM (true.snf.stanford.edu)
43: Shutdown p5000etch: load lock won't vent (booth.snf.stanford.edu)
44: Shutdown p5000etch: could not vent the load chamber-wafers stuck (dhelqaq.snf.stanford.edu)
45: Shutdown p5000etch: could not vent the load chamber-wafers stuck (booth.snf.stanford.edu)
46: Problem p5000etch: ChamberD vane pump needs repair. (cbaxter.snf.stanford.edu)
47: Shutdown p5000etch 2001-01-02 06:50:05: (booth.snf.stanford.edu)
48: Re: Shutdown p5000etch 2001-01-02 06:50:05: (booth.snf.stanford.edu)
49: Shutdown p5000etch 2001-01-09 17:09:25: Wafer stuck in Ch B (latta.snf.stanford.edu)
50: Re: Shutdown p5000etch 2001-01-09 17:09:25: Wafer stuck in Ch B (cbaxter.snf.stanford.edu)
51: Problem p5000etch 2001-01-11 18:07:05: Wafer did not drop on blade from chamber C (manjot.snf.stanford.edu)
52: Shutdown p5000etch 2001-01-11 18:07:25: (manjot.snf.stanford.edu)
53: Re: Shutdown p5000etch 2001-01-11 18:07:25: removed wafer out of chamber C (cbaxter.snf.stanford.edu)
54: Re: Problem p5000etch 2001-01-11 18:07:05: Wafer did not drop on blade from chamber C (cbaxter.snf.stanford.edu)
55: Shutdown p5000etch 2001-01-18 17:26:51: heat exchangers shutting off system (booth.snf.stanford.edu)
56: Re: Shutdown p5000etch 2001-01-18 17:26:51: heat exchangers shutting off system (cbaxter.snf.stanford.edu)
57: Shutdown p5000etch 2001-01-31 10:11:53: flowmeter on HX-1 failed. (booth.snf.stanford.edu)
58: Re: Shutdown p5000etch 2001-01-31 10:11:53: flowmeter on HX-1 failed. (cbaxter.snf.stanford.edu)
59: Problem p5000etch 2001-02-07 16:26:19: Ch. D alarm... I just cleared it. (latta.snf.stanford.edu)
60: Re: Problem p5000etch 2001-02-07 16:26:19: Ch. D alarm... I just cleared it. (cbaxter.snf.stanford.edu)
61: Problem p5000etch 2001-02-09 15:51:44: Chamber C, no HBr available (booth.snf.stanford.edu)
62: Shutdown p5000etch 2001-02-13 07:35:09: HX-1 flow fault is turning off heater circuit. (booth.snf.stanford.edu)
63: Re: Shutdown p5000etch 2001-02-13 07:35:09: HX-1 flow fault is turning off heater circuit. (booth.snf.stanford.edu)
64: Problem p5000etch 2001-02-14 09:08:04: Chamber A, Chlorine nearly empty (booth.snf.stanford.edu)
65: Re: Problem p5000etch 2001-02-14 09:08:04: Chamber A, Chlorine nearly empty (booth.snf.stanford.edu)
66: Problem p5000etch 2001-02-16 17:43:15: SYSTEM WILL NOT UNLOAD WAFERS FROM ELEVATOR TO CASSETTE, JIM MCVITTE UNLOADED THEM. (manjot.snf.stanford.edu)
67: Re: Problem p5000etch 2001-02-16 17:43:15: SYSTEM WILL NOT UNLOAD WAFERS FROM ELEVATOR TO CASSETTE, JIM MCVITTE UNLOADED THEM. (booth.snf.stanford.edu)
68: Shutdown p5000etch 2001-02-21 03:21:03: WAFERS STUCK INSIDE CHAMBER A. WILL NOT UNLOAD AFTER PROCESS, ERROR " CANNOT VENT LOAD CHAMBER ". (manjot.snf.stanford.edu)
69: Re: Shutdown p5000etch 2001-02-21 03:21:03: WAFERS STUCK INSIDE CHAMBER A. WILL NOT UNLOAD AFTER PROCESS, ERROR " CANNOT VENT LOAD CHAMBER ". (cbaxter.snf.stanford.edu)
70: Problem p5000etch 2001-02-27 21:08:13: P5000 faults (metzler.snf.stanford.edu)
71: Re: Problem p5000etch 2001-02-27 21:08:13: P5000 faults (cbaxter.snf.stanford.edu)
72: Re: Problem p5000etch 2001-02-09 15:51:44: Chamber C, has HBr okay to run (seymour.snf.stanford.edu)
73: Shutdown p5000etch 2001-03-12 11:41:15: WAFER FELL INSIDE CHAMBER C (manjot.snf.stanford.edu)
74: Re: Shutdown p5000etch 2001-03-12 11:41:15: WAFER FELL INSIDE CHAMBER C (booth.snf.stanford.edu)
75: Comment p5000etch 2001-03-13 09:19:16: Ch B (metzler.snf.stanford.edu)
76: Shutdown p5000etch 2001-03-15 17:57:27: need to cycled fomblin oil on pumps.. (cbaxter.snf.stanford.edu)
77: Re: Shutdown p5000etch 2001-03-15 17:57:27: need to cycled fomblin oil on pumps.. (cbaxter.snf.stanford.edu)
78: Problem p5000etch 2001-03-18 19:25:17: Ch B P5000 (metzler.snf.stanford.edu)
79: Re: Problem p5000etch 2001-03-18 19:25:17: Ch B P5000 (cbaxter.snf.stanford.edu)
80: Shutdown p5000etch 2001-03-21 13:30:15: Wafer in CHC (song.snf.stanford.edu)
81: Re: Shutdown p5000etch 2001-03-21 13:30:15: Wafer in CHC (booth.snf.stanford.edu)
82: Shutdown p5000etch 2001-03-21 20:02:20: (song.snf.stanford.edu)
83: Re: Shutdown p5000etch 2001-03-21 20:02:20: (cbaxter.snf.stanford.edu)
84: Shutdown p5000etch 2001-04-01 20:21:26: robot stuck? It won't get wafers. (hopcroft.snf.stanford.edu)
85: Re: Shutdown p5000etch 2001-04-01 20:21:26: robot stuck? It won't get wafers. (cbaxter.snf.stanford.edu)
86: Problem p5000etch 2001-04-03 14:43:11: Chamber D will only heat to 180C. (mcvittie.snf.stanford.edu)
87: Problem p5000etch 2001-04-04 10:45:28: Shutdown Chamber A (booth.snf.stanford.edu)
88: Problem p5000etch 2001-04-13 12:08:02: ch b debris (metzler.snf.stanford.edu)
89: Re: Problem p5000etch 2001-04-13 12:08:02: ch b debris (booth.snf.stanford.edu)
90: Problem p5000etch 2001-04-18 07:48:18: Shutdown Chamber D (booth.snf.stanford.edu)
91: Problem p5000etch 2001-04-27 18:09:40: chamber c: MFC control (myliao.snf.stanford.edu)
92: Re: Problem p5000etch 2001-04-27 18:09:40: chamber c: MFC control (booth.snf.stanford.edu)
93: Shutdown p5000etch 2001-05-03 11:26:15: WAFER BROKE INSIDE CHAMBER C (manjot.snf.stanford.edu)
94: Re: Shutdown p5000etch 2001-05-03 11:26:15: WAFER BROKE INSIDE CHAMBER C (booth.snf.stanford.edu)
95: Problem p5000etch 2001-05-03 15:05:11: Ch C needs to be seasoned before regular use. (booth.snf.stanford.edu)
96: Problem p5000etch 2001-05-03 18:56:54: Chamber C He leak (greene.snf.stanford.edu)
97: Re: Problem p5000etch 2001-05-03 18:56:54: Chamber C He leak (cbaxter.snf.stanford.edu)
98: Re: Problem p5000etch 2001-05-03 15:05:11: Ch C needs to be seasoned before regular use. (cbaxter.snf.stanford.edu)
99: Shutdown p5000etch 2001-05-10 17:37:52: Wafer stuck inside Ch.A (narya.snf.stanford.edu)