Subject: Comment p5000etch SNF 2012-11-11 07:58:24: Chamber's l/r
From: cbaxter@snf.stanford.edu

-Chamber A: Base pressure@0.9mt and l/r@0.1mt
-Chamber B: Base presuure@0.9mt and l/r:@0.3mt
-Chamber C: Base pressure@0.4mt and l/r@0.1mt