Subject: Re: Problem p5000etch SNF 2012-11-27 14:22:55: High He flow, 29.4sccm
From: cbaxter@snf.stanford.edu

Vented chamber and found wafer chips on top of the large lip seal.
Vacuumed wafer chips and changed both 4 small and large 
lip seal. Wiped down chamber with ipa, pump down chamber for
30mins and checked backside he leak 1.5sccm  with dummy a wafer.