p5000etch-pcs@snf.stanford.edu: 3800: Re: Problem p5000etch SNF 2012-12-09 17:06:34: chipped wafers

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Subject: Re: Problem p5000etch SNF 2012-12-09 17:06:34: chipped wafers
From: eenriquez@snf.stanford.edu

Wafer clamp looks OK. Adjusted wafer placement in chamber and cycled 8 wafers with no
problems.

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