Subject: Re: Problem p5000etch SNF 2012-12-10 16:35:34: Chamber B still chipping wafers
From: cbaxter@snf.stanford.edu

Vented chamber and checked and verfied wafer placement into 
chamber B good(wafer is center) found the small wafer chip
on top of the pedestal quartz right on the wafer flat and wafer chip
look thin for a standard silicon wafer.