p5000etch-pcs@snf.stanford.edu: 3804: Re: Problem p5000etch SNF 2012-12-10 22:45:48: Ch.B shut down

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Subject: Re: Problem p5000etch SNF 2012-12-10 22:45:48: Ch.B shut down
From: latta@snf.stanford.edu

clamp replaced and 8 wafers cycled without incident.

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