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Messages 0xx
01:
Wafer carrier
(
Helen L. Kung
)
02:
Pquest is up.
(
Len Booth
)
03:
Problems with pquest mailing list ...
(
John Shott
)
04:
Re: Problems with pquest mailing list ...
(
Matthew A Pelton
)
05:
Plasma Quest status 03/15/01
(
Len Booth
)
06:
Nitride testing
(
Matthew A Pelton
)
07:
Cl2 offset
(
Luigi Scaccabarozzi
)
08:
Plasma Quest Cl2
(
Chien Chung Lin
)
09:
Re: Plasma Quest Cl2
(
Luigi Scaccabarozzi
)
10:
PlasmaQuest this weekend
(
Matthew A Pelton
)
11:
Reschedule nitride
(
Matthew A Pelton
)
12:
PQuest etch monitor system
(
Rafael Aldaz
)
13:
Reservation of PlasmaQuest
(
Matthew A Pelton
)
14:
Plasma Quest status 06/05/01
(
Len Booth
)
15:
Plasma Quest status 06/08/01
(
Len Booth
)
16:
PQuest clamp sensor problem
(
Janice Catherine Wynn
)
17:
Re: PQuest clamp sensor problem
(
Luigi Scaccabarozzi
)
18:
Toxic gas shutdown Aug. 6
(
Dick Crane
)
19:
Pquest is up again
(
Len Booth
)
20:
Toxic gas tests complete
(
Dick Crane
)
21:
HBr gas is not available at this time.
(
Len Booth
)
22:
HBr is available again
(
Len Booth
)
23:
shutdown
(
Cesar Baxter
)
24:
Nitride Deposition
(
Jim McVittie
)
25:
Password
(
Henry Phan
)
26:
Pquest gas flows
(
Len Booth
)
27:
pquest available for use without Cl2
(
Dick Crane
)
28:
pquest Cl2 ok to use
(
Dick Crane
)
29:
Removed reservation 10:30-12:30
(
Daniel Weaver
)
30:
PQuest Operating Procedure
(
Henry Phan
)
31:
Tool down
(
Daniel Weaver
)
32:
Pquest is ready for seasoning
(
Len Booth
)
33:
PQ working right now
(
Yi Dong
)
34:
Pquest status 05/09/02
(
Len Booth
)
35:
pquest status
(
Dick Crane
)
36:
low temp operation
(
Randy True
)
37:
Report on Recent PlasmaQuest Problem
(
Jim McVittie
)
38:
Re: Report on Recent PlasmaQuest Problem
(
Vijit Sabnis
)
39:
Re: Report on Recent PlasmaQuest Problem
(
Daniel Weaver
)
40:
no bias = bad etch
(
Randy True
)
41:
Re: no bias = bad etch
(
Jim McVittie
)
42:
Pquest Chlorine flow rates
(
Len Booth
)
43:
gas bottle checks
(
Ray Seymour
)
44:
gas bottle checks
(
Ray Seymour
)
45:
Pquest Maintenance Shutdown
(
Len Booth
)
46:
Re: Report on Recent PlasmaQuest Problem
(
Jim McVittie
)
47:
Re: Report on Recent PlasmaQuest Problem
(
Yi Dong
)
48:
Plasma Quest update June 27
(
Len Booth
)
49:
Pquest status July 2,2002
(
Len Booth
)
50:
Pquest status July 3, 2002
(
Len Booth
)
51:
current shutdown
(
Randy True
)
52:
Plasma Quest status July 16
(
Len Booth
)
53:
diagnostic etch wafers and processes
(
Randy True
)
54:
Re: diagnostic etch wafers and processes
(
Vijit Sabnis
)
55:
Re: diagnostic etch wafers and processes
(
Yi Dong
)
56:
Pquest status Thursday 7/18/02
(
Len Booth
)
57:
Pquest status Monday July 22, 2002
(
Len Booth
)
58:
Pquest status July 25, 2002
(
Len Booth
)
59:
Pquest not ready for public - yet
(
Len Booth
)
60:
Passdown (fwd)
(
Vijit Sabnis
)
61:
etch summary
(
Randy True
)
62:
Re: Passdown (fwd)
(
Jim McVittie
)
63:
update on etching rate
(
Luigi Scaccabarozzi
)
64:
PQuest
(
Cesar Baxter
)
65:
one day shutdown
(
Len Booth
)
66:
Coral
(
Cesar Baxter
)
67:
shutdown
(
Cesar Baxter
)
68:
Online
(
Cesar Baxter
)
69:
bias good
(
Evan Thrush
)
70:
free from 4:30 to 8:00p
(
Carl Faulkner
)
71:
pquest available from 2 to 4 pm
(
Kim, Han-jun
)
72:
canceled reservation for Tues night
(
Carl Faulkner
)
73:
pquest help
(
cshen.briontech.com
)
74:
pquest available from 3:30 till 6 pm
(
Kim, Han-jun
)
75:
PQuest 6-9pm today
(
Mark Wistey
)
76:
resv Thurs 9-11am canceled
(
Randy True
)
77:
double sided copper tape...
(
David Fattal
)
78:
pquest available from 4:30~6:30 pm today
(
Kim, Han-jun
)
79:
reservation today canceled 10-2pm, machine open now
(
Randy True
)
80:
request for a pquest user meeting very soon
(
Randy True
)
81:
PlasmaQuest Use
(
Jim McVittie
)
82:
Re: request for a pquest user meeting very soon
(
Mark Wistey
)
83:
Re: PlasmaQuest Use
(
Randy True
)
84:
Pepsi Challenge
(
Randy True
)
85:
Re: Pepsi Challenge
(
Kai-Mei Camilla Fu
)
86:
Re: PlasmaQuest Use
(
Jim McVittie
)
87:
reservation tonight canceled 7pm on
(
Randall True
)
88:
my last etch info
(
Luigi Scaccabarozzi
)
89:
Re: my last etch info
(
Jim McVittie
)
90:
Pquest is off Shutdow & ready again. Len
(
Len Booth
)
91:
pquest free until 1:00 p.m.
(
Kai-Mei Camilla Fu
)
92:
Sunday res removed.
(
cshen.briontech.com
)
93:
pquest res removed.
(
cshen.briontech.com
)
94:
Reservation Time
(
Henry Phan
)
95:
reservation open 12-3 wednesday
(
Kai-Mei Camilla Fu
)
96:
user meeting
(
Kai-Mei Camilla Fu
)
97:
PQuest Time Split
(
Jim McVittie
)
98:
Re: user meeting
(
Mark Wistey
)
99:
Restrictions on PQuest Training
(
Jim McVittie
)
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