Subject: RTP status
From: Ted Berg <tberg@stanford.edu>
Date: Wed, 07 Apr 2010 08:46:24 -0700

Thanks to all who responded. The short answer is that  we do not know 
for sure how long the tools will be down. We will obviously try to keep 
downtime to a minimum. There will be a lot of work going on to install
  the new ALD as well as replumbing the new AW610 RTPs. Could users 
please advise what gases are used in their processing. Is it just N2 or 
Forming gas or others. Once again thank you for your cooperation as we 
strive to improve the lab. ted