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Lab Fees

Fee Schedules


The fees and overhead applied are determined by how your organization is classified. The categories are as follows:

  • Stanford University and Affiliates: Stanford- or SLAC- sponsored researchers. R&D for an industrial organization outside of an academic collaboration is charged at industrial rates. SNF fees are quoted here as direct cost, since overhead is deducted by Stanford in administration of research contracts.
  • Other Academic: Researchers employed by or with appointments at a non-Stanford University academic institution. Non-Stanford academic Investigators are eligible for the CIS New User Grant.
  • Industry/Government: Any non-academic organizations, including National Labs.
  • Industry SBIR: Companies supported by a recognized SBIR program may be eligible for the special discount SBIR rate. Documentation of the SBIR award will be required. For more information, contact our Program Manager.

Equipment Use & Tool Rates

Equipment fees are used to recover the associated operating costs associated (general supplies, gases, spare parts, etc.) Equipment charges are based on usage time. There is no charge for time in the lab, only for equipment use. Most tools in the lab are charged at the Base Rate. Many tools have no cost associated with use (microscopes, basic in-line monitoring systems) Simpler tools (wet benches, for example) are charged at a reduced rate of 2/3 the Base Rate. The Reduced Rate tools are listed <here>. A few critical tools are charged at a Premium Tool rate of 23% above the Base. The Premium tools are Epi2, Raith and ASML. Effective October 2011, precious metal use is charged, in addition to Base Rate for metallization tools; this will appear as equipment use charges for these tools.

Cap and Notched Cap System

The Cap system is a graduated monthly equipment use fee. Equipment use below the Cap is charged at the Base Rate hourly fee. Equipment use above the Notched Cap (160 hours X Base Rate Hourly Fee) is charged at 25% of the Base Rate. Equipment use between the Cap and Notched Cap accrues no additional charge above the met Cap. The equipment use fees are cumulative for the calendar month and reset to zero on the first day of every month. The Cap is a dollar amount; the actual equipment time a labmember may have incurred to reach the Cap will depend on the rate of the tools used (base, reduced, or premium rates.) Effective December 1, 2012, the Cap will be equivalent to 40 hours of equipment use at the Base Rate.


The Cap system allows researchers to work without having to watch the clock -- and has the added benefit of allowing project managers to accurately budget for lab fees since they become more predictable, which particularly important for funding proposals. The Notched Cap discourages wasteful equipment use and encourages safety by imposing costs on excess hours worked in the lab.

Multiple labmembers on the same account are each subject to his/her own caps. One labmember working on more multiple accounts is subject to a cap for each account. In summary: one cap or notched cap per person, per project, per calendar month.

Staff Support

Staff charges are incurred for staff supported lab activities, such as training and processing requests. Training fees are described in Equipment Contacts. Limited support for fabrication services is offered and charged at the Staff Recharge rates indicated. Process Staff and Technical Liaisons are available for consultation inside and outside te lab without charge. There is also no charge for the Orientation and Safety Laboratory Class. However, projects requiring major technical assistance might be subject to Process Staff Support charges.


Stanford University charges overhead for all sponsored projects and related activities. The FY '13/14 overhead rate is 60.5%. Overhead is applied to all fees, including charges incurred from staff support and the stockroom, as well as equipment use. Stanford and SLAC labmembers already pay overhead, as this is built into all research contracts administered through the University. "Other Academic" Labmembers, already pay overhead at their own home institutions and are therefore subject to a courtesy University overhead of 8%. Industry/Government labmembers are funded from agencies outside Stanford and are therefore subject to the full overhead. Invoices are issued by Stanford and will list overhead as a separate line item under "Facilities and Administration Charges."