From skoh at snf.stanford.edu Fri Dec 1 17:50:37 2006 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Fri, 1 Dec 2006 17:50:37 -0800 Subject: Problem AG4100 SNF 2006-12-01 17:50:37: Robot arm not picking up wafers Message-ID: Robot arm was unable to pick up the wafers.Tried running the system in manual mode, but the wafer was not picked up correctly, and the system faulted out. Restarting the computer did not help too. The robot arm is not in line with the Send cassette From eenriquez at snf.stanford.edu Mon Dec 4 14:33:12 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Dec 2006 14:33:12 -0800 Subject: Shutdown AG4100 SNF 2006-12-04 14:33:11: Wafer vacuum is too low Message-ID: Might need a new wafer vacuum pump. I will troubleshoot further tomorrow. From eenriquez at snf.stanford.edu Tue Dec 5 08:53:30 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 5 Dec 2006 08:53:30 -0800 Subject: Shutdown AG4100 SNF 2006-12-04 14:33:11: Wafer vacuum is too low Message-ID: Connected system to house vacuum instead of the system's vacuum pump. Ran test wafers with no problems. From eenriquez at snf.stanford.edu Tue Dec 5 08:53:48 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 5 Dec 2006 08:53:48 -0800 Subject: Problem AG4100 SNF 2006-12-01 17:50:37: Robot arm not picking up wafers Message-ID: Connected system to house vacuum instead of the system's vacuum pump. Ran test wafers with no problems.