Problem AG4100 SNF 2006-12-01 17:50:37: Robot arm not picking up wafers

skoh at snf.stanford.edu skoh at snf.stanford.edu
Fri Dec 1 17:50:37 PST 2006


Robot arm was unable to pick up the wafers.Tried running the system in manual mode, but the wafer was not picked up correctly, and the system faulted out. Restarting the computer did not help too. The robot arm is not in line with the Send cassette




More information about the AG4100-pcs mailing list