Shutdown AG4100 SNF 2006-12-04 14:33:11: Wafer vacuum is too low

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Dec 5 08:53:30 PST 2006

Previous message: Shutdown AG4100 SNF 2006-12-04 14:33:11: Wafer vacuum is too low
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Connected system to house vacuum instead of the system's vacuum pump.  Ran test wafers with no problems.

Previous message: Shutdown AG4100 SNF 2006-12-04 14:33:11: Wafer vacuum is too low
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the AG4100-pcs mailing list