Problem AG4100 SNF 2006-12-01 17:50:37: Robot arm not picking up wafers

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Dec 5 08:53:48 PST 2006

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Connected system to house vacuum instead of the system's vacuum pump.  Ran test wafers with no problems.

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Next message: Shutdown AG4100 SNF 2006-12-04 14:33:11: Wafer vacuum is too low
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