From emyers at snf.stanford.edu Wed Nov 8 08:16:46 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 8 Nov 2006 08:16:46 -0800 Subject: Problem AG4100 SNF 2006-10-01 01:12:20: No mail !! Message-ID: Noted. email needs to go to Coral at snf.stanford.edu From emyers at snf.stanford.edu Wed Nov 8 08:17:08 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 8 Nov 2006 08:17:08 -0800 Subject: Comment AG4100 SNF 2006-10-06 09:30:27: Needs another temp qualification Message-ID: From gladys at snf.stanford.edu Wed Nov 15 12:28:45 2006 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Wed, 15 Nov 2006 12:28:45 -0800 Subject: Problem AG4100 SNF 2006-11-15 12:28:44: Temp went down during the process run Message-ID: From pethe at snf.stanford.edu Thu Nov 16 01:18:43 2006 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Thu, 16 Nov 2006 01:18:43 -0800 Subject: Shutdown AG4100 SNF 2006-11-16 01:18:42: Low Pyro Level Message-ID: The system shut itself down on my first wafer at 600C anneal. The intensity shot up out of scale. Tried repeating the process but gave the error "Low Pyro Level" From eenriquez at snf.stanford.edu Thu Nov 16 13:00:38 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 16 Nov 2006 13:00:38 -0800 Subject: Shutdown AG4100 SNF 2006-11-16 01:18:42: Low Pyro Level Message-ID: Replaced pyrometer water fittings. Cycled six wafers with no problems. From eenriquez at snf.stanford.edu Thu Nov 16 13:03:08 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 16 Nov 2006 13:03:08 -0800 Subject: Problem AG4100 SNF 2006-11-15 12:28:44: Temp went down during the process run Message-ID: Unable to duplicate problem. From pethe at snf.stanford.edu Thu Nov 16 18:07:39 2006 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Thu, 16 Nov 2006 18:07:39 -0800 Subject: Shutdown AG4100 SNF 2006-11-16 18:07:38: Pyrometer problem - same as yesterday Message-ID: I have run the recipe 600ON many times before on this system. The pyrometer fails during the nitridation step at 600C. Visual inspection of the chamber during the run indicates that the lamps shut down, at this point the screen shows the intensity reading shooting through the graph. I removed the wafer in manual mode. I tried running the wafer again, and I got the message, " Overtemp Top plate - alarm code 9". From eenriquez at snf.stanford.edu Mon Nov 20 14:37:09 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Nov 2006 14:37:09 -0800 Subject: Comment AG4100 SNF 2006-11-20 14:37:09: Need clean wafers to test Message-ID: Replaced dirty water lines. Now need clean wafers to test system. From emyers at snf.stanford.edu Mon Nov 20 17:37:52 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 20 Nov 2006 17:37:52 -0800 Subject: Problem AG4100 SNF 2006-11-20 17:37:52: MUST READ Message-ID: There is still a problem with the system. I can run one wafer of Qual1150, for 30 sec. with good results. System faults for top plate temp after the 1st wafer and will not run a second. I will move the system to yellow, but you need to test your recipe first (long times maybe a problem) and you will only get 1 wafer at a time. This will give you more temp scatter in your data. From emyers at snf.stanford.edu Mon Nov 20 17:38:32 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 20 Nov 2006 17:38:32 -0800 Subject: Comment AG4100 SNF 2006-11-20 14:37:09: Need clean wafers to test Message-ID: Tested system on wafers cleaned by helpful users From emyers at snf.stanford.edu Mon Nov 20 17:57:14 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 20 Nov 2006 17:57:14 -0800 Subject: Comment AG4100 SNF 2006-11-20 17:57:13: 600ON Recipe Message-ID: Ran 600ON recipe and it failed late in the NH3 step. I will leave the system down. Results can be found Ed/User Tests From eenriquez at snf.stanford.edu Tue Nov 21 11:55:15 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Nov 2006 11:55:15 -0800 Subject: Shutdown AG4100 SNF 2006-11-16 18:07:38: Pyrometer problem - same as yesterday Message-ID: Found intermittent thermal switch. Bypassed the switch. There are two other switches in the same area which will protect the chamber in case of a over heating problem. Ran three wafers using the 600N recipe with no problems. I will order a new switch to replace the defective one. From eenriquez at snf.stanford.edu Tue Nov 21 11:55:28 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Nov 2006 11:55:28 -0800 Subject: Problem AG4100 SNF 2006-11-20 17:37:52: MUST READ Message-ID: Found intermittent thermal switch. Bypassed the switch. There are two other switches in the same area which will protect the chamber in case of a over heating problem. Ran three wafers using the 600N recipe with no problems. I will order a new switch to replace the defective one. From eenriquez at snf.stanford.edu Tue Nov 21 11:55:49 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Nov 2006 11:55:49 -0800 Subject: Comment AG4100 SNF 2006-11-20 17:57:13: 600ON Recipe Message-ID: Found intermittent thermal switch. Bypassed the switch. There are two other switches in the same area which will protect the chamber in case of a over heating problem. Ran three wafers using the 600N recipe with no problems. I will order a new switch to replace the defective one. From fengj at snf.stanford.edu Wed Nov 22 10:52:57 2006 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Wed, 22 Nov 2006 10:52:57 -0800 Subject: Problem AG4100 SNF 2006-11-22 10:52:52: Abnormal temperature rise Message-ID: Tried RTA_940 yesterday.For the first 5 wafers, the real temperature rose to about 700 - 800 degree C during the first two delay steps, and dropped before the desired ramp up. The real temperature rampped to 940 degree C pretty well, but after the stable step it stayed around 800 degree C instead of going down and we had to press the "SAVE EXIT" button to stop the process. For the 6th wafer the temperature did not rise during the first two delay steps but still could not go down after the stable step. For the following 2 wafers, the temperature profile was as abnormal as in the case of the first 5 wafers. During all the abnormal temperature rise, we could see the glowing from the chamber. It seemed that there was a glitch in the control system so that the heating lamp power could not be turned off. From fengj at snf.stanford.edu Wed Nov 22 10:56:29 2006 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Wed, 22 Nov 2006 10:56:29 -0800 Subject: Problem AG4100 SNF 2006-11-22 10:56:28: flashing screen Message-ID: During the process yesterday, the screen frequently turned black for about 1 second and then came back to normal display. From robinhmb at yahoo.com Wed Nov 22 12:36:58 2006 From: robinhmb at yahoo.com (Robin King) Date: Wed, 22 Nov 2006 12:36:58 -0800 (PST) Subject: AG4100 Shutdown. Propose using 4108 now - Please respond In-Reply-To: <20061122185258.096084C0BF@smtp1.stanford.edu> Message-ID: <231399.90548.qm@web58714.mail.re1.yahoo.com> First, this should be a shutdown as it's a potentially dangerous situation. Since this problem has been a long term one I propose using the 4108 again for silicides, changing the quartzware in and out as needed, i.e. reverting to the past mode before the 4100 came up. Since the the long holiday is here it would be good to have silicide RTA availability before staff leaves for the holiday and training a couple of long term users how and where the clean/silicide quartzware is kept. --- fengj at snf.stanford.edu wrote: > Tried RTA_940 yesterday.For the first 5 wafers, the real > temperature rose to about 700 - 800 degree C during the first two > delay steps, and dropped before the desired ramp up. The real > temperature rampped to 940 degree C pretty well, but after the > stable step it stayed around 800 degree C instead of going down and > we had to press the "SAVE EXIT" button to stop the process. For the > 6th wafer the temperature did not rise during the first two delay > steps but still could not go down after the stable step. For the > following 2 wafers, the temperature profile was as abnormal as in > the case of the first 5 wafers. During all the abnormal temperature > rise, we could see the glowing from the chamber. It seemed that > there was a glitch in the control system so that the heating lamp > power could not be turned off. > > ____________________________________________________________________________________ Sponsored Link Rates near 39yr lows. $510,000 Loan for $1698/mo. Calcuate new payment. www.LowerMyBills.com/lre From king at snf.stanford.edu Wed Nov 22 15:46:55 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 22 Nov 2006 15:46:55 -0800 Subject: Shutdown AG4100 SNF 2006-11-22 15:46:55: Lamps won't turn off Message-ID: Lamps turn on before and after steady state is over! Potential for serious damage, safety issue. From emyers at snf.stanford.edu Mon Nov 27 10:51:42 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 27 Nov 2006 10:51:42 -0800 Subject: Problem AG4100 SNF 2006-10-31 19:52:19: Scraping noise inside the chamber Message-ID: End effector bumps wafer tray. Elmer made adjustment. From emyers at snf.stanford.edu Mon Nov 27 10:53:02 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 27 Nov 2006 10:53:02 -0800 Subject: Problem AG4100 SNF 2006-11-22 10:56:28: flashing screen Message-ID: Screen flashes once you acknowledge process is complete. This is not new and is part of the new software. From emyers at snf.stanford.edu Mon Nov 27 10:54:34 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 27 Nov 2006 10:54:34 -0800 Subject: Comment AG4100 SNF 2006-11-27 10:54:33: 600ON Recipe Message-ID: Elmer and I (3x)ran the recipe a number of times without any faults. Data can be found in Ed/User Tests/600ON.011-.013. From eenriquez at snf.stanford.edu Mon Nov 27 11:17:20 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Nov 2006 11:17:20 -0800 Subject: Shutdown AG4100 SNF 2006-11-22 15:46:55: Lamps won't turn off Message-ID: Found corrosion on the water leak sensor. Cleaned sensor. Ran 15 wafers using rta940 and 5 wafers using 600ON with no problems. From eenriquez at snf.stanford.edu Mon Nov 27 11:25:14 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Nov 2006 11:25:14 -0800 Subject: Problem AG4100 SNF 2006-11-22 10:52:52: Abnormal temperature rise Message-ID: Found corrosion on the water leak sensor. Cleaned sensor and ran 15 wafers using 940rta and 5 wafers using 600ON with no problems. From pethe at snf.stanford.edu Mon Nov 27 20:45:12 2006 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Mon, 27 Nov 2006 20:45:12 -0800 Subject: Shutdown AG4100 SNF 2006-11-27 20:45:12: Abnormal Temp Rise Message-ID: Same problem as before. The temp shot up during the initial delay steps. In two recipes NISI_450 and 600ON. From pethe at snf.stanford.edu Mon Nov 27 20:47:30 2006 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Mon, 27 Nov 2006 20:47:30 -0800 Subject: Problem AG4100 SNF 2006-11-27 20:47:29: Additional Comment Message-ID: Loud hissing noise during the run. From the air line From eenriquez at snf.stanford.edu Tue Nov 28 13:08:36 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Nov 2006 13:08:36 -0800 Subject: Problem AG4100 SNF 2006-11-27 20:47:29: Additional Comment Message-ID: The loud hissing sound is caused by the large flow of air used to cool the chamber. This sound is normally dampened by the plexiglass front panel. I will re-install the panel when I'm done working with the system. From eenriquez at snf.stanford.edu Tue Nov 28 13:27:24 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Nov 2006 13:27:24 -0800 Subject: Shutdown AG4100 SNF 2006-11-27 20:45:12: Abnormal Temp Rise Message-ID: Found the computer was unable to control the lamp power. The lamps were going to about 70% power when the setpoint was set to 0%. Replaced the zero crossing board. Ran 600ON recipe but 3 out of 4 wafers faulted for "temp too high". Temporarily changed the ramp time from 7 sec to 9 sec. Was able to process 6 wafers consecutively with no problems. From emyers at snf.stanford.edu Thu Nov 30 07:51:55 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 30 Nov 2006 07:51:55 -0800 Subject: Comment AG4100 SNF 2006-11-27 10:54:33: 600ON Recipe Message-ID: Elmer found a bad cross over board which caused intermittent faults. Worked with user and he was able to process his wafers without problems.