Shutdown AG4100 SNF 2006-11-16 01:18:42: Low Pyro Level

pethe at snf.stanford.edu pethe at snf.stanford.edu
Thu Nov 16 01:18:43 PST 2006


The system shut itself down on my first wafer at 600C anneal. The intensity shot up out of scale. Tried repeating the process but gave the error "Low Pyro Level"




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