Shutdown AG4100 SNF 2006-11-16 01:18:42: Low Pyro Level

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Nov 16 13:00:38 PST 2006


Replaced pyrometer water fittings.  Cycled six wafers with no problems.




More information about the AG4100-pcs mailing list