Problem AG4100 SNF 2006-11-20 17:37:52: MUST READ

emyers at snf.stanford.edu emyers at snf.stanford.edu
Mon Nov 20 17:37:52 PST 2006


There is still a problem with the system.  I can run one wafer of Qual1150, for 30 sec. with good results.  System faults for top plate temp after the 1st wafer and will not run a second.  I will move the system to yellow, but you need to test your recipe first (long times maybe a problem) and you will only get 1 wafer at a time.  This will give you more temp scatter in your data.




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