Shutdown AG4100 SNF 2006-11-16 18:07:38: Pyrometer problem - same as yesterday

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Nov 21 11:55:15 PST 2006


Found intermittent thermal switch. Bypassed the switch.  There are two other switches in the same area which will protect the chamber in case of a over heating problem.  Ran three wafers using the 600N recipe with no problems.  I will order a new switch to replace the defective one.




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