Comment AG4100 SNF 2006-11-20 17:57:13: 600ON Recipe

eenriquez at eenriquez at
Tue Nov 21 11:55:49 PST 2006

Found intermittent thermal switch. Bypassed the switch.  There are two other switches in the same area which will protect the chamber in case of a over heating problem.  Ran three wafers using the 600N recipe with no problems.  I will order a new switch to replace the defective one.

More information about the AG4100-pcs mailing list