Shutdown AG4100 SNF 2006-11-22 15:46:55: Lamps won't turn off

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Nov 27 11:17:20 PST 2006

Previous message: Shutdown AG4100 SNF 2006-11-22 15:46:55: Lamps won't turn off
Next message: Problem AG4100 SNF 2006-10-31 19:52:19: Scraping noise inside the chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Found corrosion on the water leak sensor.  Cleaned sensor.  Ran 15 wafers using rta940 and 5 wafers using 600ON with no problems.

Previous message: Shutdown AG4100 SNF 2006-11-22 15:46:55: Lamps won't turn off
Next message: Problem AG4100 SNF 2006-10-31 19:52:19: Scraping noise inside the chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the AG4100-pcs mailing list