Problem AG4100 SNF 2006-11-22 10:52:52: Abnormal temperature rise

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Nov 27 11:25:14 PST 2006


Found corrosion on the water leak sensor.  Cleaned sensor and ran 15 wafers using 940rta and 5 wafers using 600ON with no problems.




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