Shutdown AG4100 SNF 2006-11-27 20:45:12: Abnormal Temp Rise

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Nov 28 13:27:24 PST 2006


Found the computer was unable to control the lamp power.  The lamps were going to about 70% power when the setpoint was set to 0%.  Replaced the zero crossing board.  Ran 600ON recipe but 3 out of 4 wafers faulted for "temp too high".  Temporarily changed the ramp time from 7 sec to 9 sec.  Was able to process 6 wafers consecutively with no problems.




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