Problem AG4100 SNF 2007-02-16 20:52:51: Temp dropped suddenly while in Steady Temp step

skoh at snf.stanford.edu skoh at snf.stanford.edu
Fri Feb 16 20:52:52 PST 2007


I was running 300s anneal at 850C ( RTA_850.RCP )  In the middle of the steady step, the temperature started dropping rapidly from 850C, causing the recipe to abort.




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