From shott at snf.stanford.edu Sat Jan 20 12:02:33 2007 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 20 Jan 2007 12:02:33 -0800 Subject: Problem AG4100 SNF 2007-01-20 12:02:33: No N2O available ... Message-ID: RTA users: When the fire alarm went off on Saturday morning, it normally shuts off all toxic and corrosive gases. When the alarm was cleared, I reset all of those gases. However, the N2O cylinder that supplies the AG4108 (and, I think, the AG4100) would not reset. Accordingly, there is no N2O currently available on this tool. Please be aware that any recipe using N2O will likely fail. Thanks, John From ratiug at snf.stanford.edu Sun Jan 21 19:13:26 2007 From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu) Date: Sun, 21 Jan 2007 19:13:26 -0800 Subject: Problem AG4100 SNF 2007-01-21 19:13:25: no power at all even after I enabled it Message-ID: From eenriquez at snf.stanford.edu Mon Jan 22 11:44:35 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 Jan 2007 11:44:35 -0800 Subject: Problem AG4100 SNF 2007-01-20 12:02:33: No N2O available ... Message-ID: Not using N2O. No recipe require N2O at the moment. From eenriquez at snf.stanford.edu Mon Jan 22 13:38:47 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 Jan 2007 13:38:47 -0800 Subject: Problem AG4100 SNF 2007-01-21 19:13:25: no power at all even after I enabled it Message-ID: Powered up system. From eenriquez at snf.stanford.edu Mon Jan 22 13:39:22 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 Jan 2007 13:39:22 -0800 Subject: Comment AG4100 SNF 2007-01-22 13:39:21: Need clean test wafers to check system Message-ID: From skoh at snf.stanford.edu Thu Jan 25 19:21:18 2007 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Thu, 25 Jan 2007 19:21:18 -0800 Subject: Problem AG4100 SNF 2007-01-25 19:21:18: Over Temperature Problem Message-ID: Using 600ON recipe. Consistently had over temperature problem when ramping up to 600C. Tried changing parameters in recipe (increasing delay time, increasing ramp time, decreasing intensity etc.), but could not get recipe to work. From skoh at snf.stanford.edu Fri Jan 26 12:27:40 2007 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Fri, 26 Jan 2007 12:27:40 -0800 Subject: Comment AG4100 SNF 2007-01-26 12:27:39: Initial Temperature too high Message-ID: I wanted to add that the error message on the Ag4100 was "Initial Temperature too high" From eenriquez at snf.stanford.edu Fri Jan 26 14:38:27 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Jan 2007 14:38:27 -0800 Subject: Problem AG4100 SNF 2007-01-25 19:21:18: Over Temperature Problem Message-ID: The actual error was Initial Temperature too high. Increased the "warm up" intensity from 12% power to 20% (600ON recipe). Ran 3 wafers with no problems. From eenriquez at snf.stanford.edu Fri Jan 26 14:38:39 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Jan 2007 14:38:39 -0800 Subject: Comment AG4100 SNF 2007-01-26 12:27:39: Initial Temperature too high Message-ID: The actual error was Initial Temperature too high. Increased the "warm up" intensity from 12% power to 20% (600ON recipe). Ran 3 wafers with no problems. From king at snf.stanford.edu Wed Jan 31 01:01:42 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 31 Jan 2007 01:01:42 -0800 Subject: Shutdown AG4100 SNF 2007-01-31 01:01:41: 4100 - Neslab chiller Message-ID: was making a terrible racket so I turned it off and unplugged it. The DI level was fine.