Problem AG4100 SNF 2007-01-25 19:21:18: Over Temperature Problem

skoh at snf.stanford.edu skoh at snf.stanford.edu
Thu Jan 25 19:21:18 PST 2007


Using 600ON recipe.  Consistently had over temperature problem when ramping up to 600C.  Tried changing parameters in recipe (increasing delay time, increasing ramp time, decreasing intensity etc.), but could not get recipe to work.




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