Problem AG4100 SNF 2007-01-25 19:21:18: Over Temperature Problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jan 26 14:38:27 PST 2007


The actual error was Initial Temperature too high.  Increased the "warm up" intensity from 12% power to 20% (600ON recipe).  Ran 3 wafers with no problems. 




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