Problem AG4100 SNF 2007-01-25 19:21:18: Over Temperature Problem
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Jan 26 14:38:27 PST 2007
The actual error was Initial Temperature too high. Increased the "warm up" intensity from 12% power to 20% (600ON recipe). Ran 3 wafers with no problems.
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