From emyers at snf.stanford.edu Fri Aug 15 08:22:51 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 15 Aug 2008 08:22:51 -0700 Subject: Comment AG4100 SNF 2008-06-06 14:56:54: Completed pyrometer cal Message-ID: Archived From emyers at snf.stanford.edu Fri Aug 15 08:23:31 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 15 Aug 2008 08:23:31 -0700 Subject: Comment AG4100 SNF 2008-07-09 11:17:01: Ammonia flowing, looks okay Message-ID: Previously noted, waiting for repair From emyers at snf.stanford.edu Fri Aug 15 08:24:31 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 15 Aug 2008 08:24:31 -0700 Subject: Comment AG4100 SNF 2008-07-15 19:44:02: RTA4100 alarm Message-ID: System was not reset after power outage From emyers at snf.stanford.edu Fri Aug 15 08:25:07 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 15 Aug 2008 08:25:07 -0700 Subject: Comment AG4100 SNF 2008-07-15 20:26:53: RTA AG4100 Message-ID: System was not reset after power outage. System was initialized and heat exchanger restarted From emyers at snf.stanford.edu Fri Aug 15 08:25:39 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 15 Aug 2008 08:25:39 -0700 Subject: Problem AG4100 SNF 2008-07-19 01:48:21: errors and cannot run Message-ID: System and heat exchanger reset From emyers at snf.stanford.edu Fri Aug 15 08:26:44 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 15 Aug 2008 08:26:44 -0700 Subject: Problem AG4100 SNF 2008-07-24 22:34:34: Chamber Door Problem Message-ID: I have seen this error. It does not seem fatal and cycling door seems to clear error. From zhangy at snf.stanford.edu Fri Aug 15 15:54:14 2008 From: zhangy at snf.stanford.edu (zhangy at snf.stanford.edu) Date: Fri, 15 Aug 2008 15:54:14 -0700 Subject: Shutdown AG4100 SNF 2008-08-15 15:54:13: robot arm error Message-ID: Because the robot arm can't transfer more than one wafer per run, I have to process one wafer at a time (always at slot 1). After the second wafer was annealed, I forgot to remove the previous wafer from the receiver cassette (slot 1), so the robot arm was stuck at the receiver end, and lost communication. I tried to set it back home, but it didn't work. :( From emyers at snf.stanford.edu Sat Aug 16 07:13:40 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sat, 16 Aug 2008 07:13:40 -0700 Subject: Problem AG4100 SNF 2008-08-16 07:13:39: Handling problem report Message-ID: Following is a lab member report. If the robot is not engauged, then it needs to be initialized. The one wafer problem sounds like the slot information for wafers was incorrectly put in by the lab member. It is true the system does not check the receive cossette and you must remove your wafers. I am changing the status from shutdown to yellow because it is a recoverable error. Because the robot arm can't transfer more than one wafer per run, I have to process one wafer at a time (always at slot 1). After the second wafer was annealed, I forgot to remove the previous wafer from the receiver cassette (slot 1), so the robot arm was stuck at the receiver end, and lost communication. I tried to set it back home, but it didn't work. :( From emyers at snf.stanford.edu Sat Aug 16 07:15:09 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sat, 16 Aug 2008 07:15:09 -0700 Subject: Shutdown AG4100 SNF 2008-08-15 15:54:13: robot arm error Message-ID: I switched the tool to yellow, since these are recoverable errors through the software. Initial problem was incorrect procedures and it appears the robot needs to be intialized. From masaharu at snf.stanford.edu Sat Aug 16 19:08:22 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sat, 16 Aug 2008 19:08:22 -0700 Subject: Problem AG4100 SNF 2008-08-16 19:08:21: Robot arm stuck Message-ID: Robot arm is now stuck at the receiver side. I tried to run two wafer. The first wafer was processed and went to the receiver casette. However, since I forgot to remove this first wafer, the second wafer went to the same place as the first wafer. This resulted in that the arm was stuck at the receiver side. I managed to remove both of the wafers, however, the arm cannot be initialized now and robot arm communication error showed up, even though I rebooted the software. This is my fault and very sorry for inconvenience. From emyers at snf.stanford.edu Mon Aug 18 08:04:30 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 18 Aug 2008 08:04:30 -0700 Subject: Problem AG4100 SNF 2008-08-16 19:08:21: Robot arm stuck Message-ID: Re-initiallized the robot without an error. Fault resulted from not removing wafer from receive cassette. From emyers at snf.stanford.edu Mon Aug 18 08:05:53 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 18 Aug 2008 08:05:53 -0700 Subject: Problem AG4100 SNF 2008-08-16 07:13:39: Handling problem report Message-ID: Initiallized robot without any errors. Did not run any wafers, but did do manual move and it seemed OK. Robot followed commands until it did not find a wafer. From emyers at snf.stanford.edu Mon Aug 18 15:24:26 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 18 Aug 2008 15:24:26 -0700 Subject: Problem AG4100 SNF 2008-08-18 15:24:26: System Restarted Message-ID: Restarted system, initiallized robot and topped off and started heat exchanger. From huimei at snf.stanford.edu Tue Aug 26 16:31:13 2008 From: huimei at snf.stanford.edu (huimei at snf.stanford.edu) Date: Tue, 26 Aug 2008 16:31:13 -0700 Subject: Problem AG4100 SNF 2008-08-26 16:31:10: intensity out of range Message-ID: when i run 775C5Min, in processing about 3~4 minutes, the intensity suddenly go up and message show out of range, then process stop. From shott at stanford.edu Tue Aug 26 16:32:34 2008 From: shott at stanford.edu (John Shott) Date: Tue, 26 Aug 2008 16:32:34 -0700 Subject: Problem AG4100 SNF 2008-08-26 16:31:10: intensity out of range In-Reply-To: <20080826233113.C672465B5EF@smtp2.stanford.edu> References: <20080826233113.C672465B5EF@smtp2.stanford.edu> Message-ID: <48B49292.9050207@stanford.edu> Is it showing any error messages? Thanks, John From hzhou at engr.ucr.edu Tue Aug 26 16:36:05 2008 From: hzhou at engr.ucr.edu (hzhou at engr.ucr.edu) Date: Tue, 26 Aug 2008 16:36:05 -0700 Subject: Problem AG4100 SNF 2008-08-26 16:31:10: intensity out of range In-Reply-To: <48B49292.9050207@stanford.edu> References: <20080826233113.C672465B5EF@smtp2.stanford.edu> <48B49292.9050207@stanford.edu> Message-ID: <20080826163605.vvanuxk2040o44ok@webmail.engr.ucr.edu> Yes. Then it asked me whether to stop(actually the lamp already shut off by itself) Quoting John Shott : > Is it showing any error messages? > > Thanks, > > John > > ---------------------------------------------------------------- This email was sent using IMP @ webmail.engr.ucr.edu! From shott at stanford.edu Tue Aug 26 16:51:40 2008 From: shott at stanford.edu (John Shott) Date: Tue, 26 Aug 2008 16:51:40 -0700 Subject: Problem AG4100 SNF 2008-08-26 16:31:10: intensity out of range In-Reply-To: <20080826163605.vvanuxk2040o44ok@webmail.engr.ucr.edu> References: <20080826233113.C672465B5EF@smtp2.stanford.edu> <48B49292.9050207@stanford.edu> <20080826163605.vvanuxk2040o44ok@webmail.engr.ucr.edu> Message-ID: <48B4970C.3080703@stanford.edu> What, specifically, did the error message say? Does it say the same thing or something different if you try to run the same recipe again? Thanks, John From jrjain at snf.stanford.edu Tue Aug 26 17:06:11 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Tue, 26 Aug 2008 17:06:11 -0700 Subject: Shutdown AG4100 SNF 2008-08-26 17:06:10: Wafer Handling Message-ID: Wafer handler robot is in bad shape. It collides with wafer at send cassette, pushing cassette back until it slides underneath to pick up wafer. When taking wafer out of chamber, robot goes to wrong position, so wafer is far off center. As a result, it drops the wafer off the pins at the cooling chamber. When putting wafers near the top of the receive cassette, the robot loads the wafers off center, so the cassette has to torque to accommodate the incoming wafer. From hzhou at engr.ucr.edu Tue Aug 26 17:39:44 2008 From: hzhou at engr.ucr.edu (hzhou at engr.ucr.edu) Date: Tue, 26 Aug 2008 17:39:44 -0700 Subject: Problem AG4100 SNF 2008-08-26 16:31:10: intensity out of range In-Reply-To: <48B4970C.3080703@stanford.edu> References: <20080826233113.C672465B5EF@smtp2.stanford.edu> <48B49292.9050207@stanford.edu> <20080826163605.vvanuxk2040o44ok@webmail.engr.ucr.edu> <48B4970C.3080703@stanford.edu> Message-ID: <20080826173944.jt26dud80ssw88o4@webmail.engr.ucr.edu> in the error message, it say sth out of range(I couldn't remember what's the exact words, but I check from the pic that's the intensity curve go up suddenly), it's the same meaning as I told you. You may try this recipe, I run 6 wafers that day and 3 wafers meet this problem. 775C 5Min Quoting John Shott : > What, specifically, did the error message say? Does it say the same > thing or something different if you try to run the same recipe again? > Thanks, > > John > > ---------------------------------------------------------------- This email was sent using IMP @ webmail.engr.ucr.edu! From eenriquez at snf.stanford.edu Fri Aug 29 11:19:02 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Aug 2008 11:19:02 -0700 Subject: Shutdown AG4100 SNF 2008-08-26 17:06:10: Wafer Handling Message-ID: Adjusted the robot height. Checked wafer hand-off to all 25 slots of the cassette. From eenriquez at snf.stanford.edu Fri Aug 29 11:22:23 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Aug 2008 11:22:23 -0700 Subject: Comment AG4100 SNF 2008-08-29 11:22:22: Update Message-ID: Found the pyrometer chiller temperature set at 12 C should be set at 18 C. Ran the pyrometer calibration From emyers at snf.stanford.edu Fri Aug 29 17:41:42 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 29 Aug 2008 17:41:42 -0700 Subject: Comment AG4100 SNF 2008-08-29 17:41:41: Qualification Results -Pass Message-ID: Wfr1: Average: 101.08 Wfr2: Average: 99.401 Wfr3: Average: 99.464 Wfr4: Average: 99.153 Wfr5: Average: 102.15 Results are consistent with past calibrations. Tool should be considered Qualified. From emyers at snf.stanford.edu Fri Aug 29 18:13:45 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 29 Aug 2008 18:13:45 -0700 Subject: Comment AG4100 SNF 2008-06-18 20:00:47: Process Qual Data 06/18/08 nvgirish Message-ID: Calibration was ran on 8-29-08 with passing results. Note, I saw similar type thickness for the 8-29-08 qual depending on the measurement routine I used. From emyers at snf.stanford.edu Fri Aug 29 18:14:26 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 29 Aug 2008 18:14:26 -0700 Subject: Comment AG4100 SNF 2008-07-24 22:59:30: Process Qual Data (07/24/2008) Message-ID: System was recalibrated and the Qual passed on 8-29-08 From emyers at snf.stanford.edu Fri Aug 29 18:15:00 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 29 Aug 2008 18:15:00 -0700 Subject: Problem AG4100 SNF 2008-07-25 14:40:39: See previous shutdown notice, 7/24. Message-ID: System was recalibrated and Passed Qual on 8-29-08 From emyers at snf.stanford.edu Fri Aug 29 18:17:05 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 29 Aug 2008 18:17:05 -0700 Subject: Problem AG4100 SNF 2008-08-29 18:17:04: Simulation Information Message-ID: skoh did TSUPREM simulations to determine the difference in reported vs. actual chamber temperature for the qual. Simulated Qual thickness is supposed to be ~120A. Measured results (7-25-08) were ~70A. According to simulation, this corresponds to a temperature difference of ~75deg. Typical Qual oxide thickness is ~100Ang. From emyers at snf.stanford.edu Fri Aug 29 18:17:37 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 29 Aug 2008 18:17:37 -0700 Subject: Comment AG4100 SNF 2008-08-29 18:17:37: Simulation Information Message-ID: skoh did TSUPREM simulations to determine the difference in reported vs. actual chamber temperature for the qual. Simulated Qual thickness is supposed to be ~120A. Measured results (7-25-08) were ~70A. According to simulation, this corresponds to a temperature difference of ~75deg. Typical Qual oxide thickness is ~100Ang. From emyers at snf.stanford.edu Fri Aug 29 18:18:03 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 29 Aug 2008 18:18:03 -0700 Subject: Problem AG4100 SNF 2008-08-29 18:17:04: Simulation Information Message-ID: I wanted to put this in as a comment From emyers at snf.stanford.edu Fri Aug 29 18:18:27 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 29 Aug 2008 18:18:27 -0700 Subject: Problem AG4100 SNF 2008-07-25 15:21:12: Temperature Off Message-ID: Changed the information over to a comment on 8-29-08. From emyers at snf.stanford.edu Fri Aug 29 18:19:10 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 29 Aug 2008 18:19:10 -0700 Subject: Problem AG4100 SNF 2008-08-18 15:24:26: System Restarted Message-ID: System has been opertating with out any related problem