Shutdown AG4100 SNF 2008-08-15 15:54:13: robot arm error

zhangy at snf.stanford.edu zhangy at snf.stanford.edu
Fri Aug 15 15:54:14 PDT 2008


Because the robot arm can't transfer more than one wafer per run, I have to process one wafer at a time (always at slot 1). After the second wafer was annealed, I forgot to remove the previous wafer from the receiver cassette (slot 1), so the robot arm was stuck at the receiver end, and lost communication. I tried to set it back home, but it didn't work. :(




More information about the AG4100-pcs mailing list