Shutdown AG4100 SNF 2008-08-15 15:54:13: robot arm error

zhangy at zhangy at
Fri Aug 15 15:54:14 PDT 2008

Because the robot arm can't transfer more than one wafer per run, I have to process one wafer at a time (always at slot 1). After the second wafer was annealed, I forgot to remove the previous wafer from the receiver cassette (slot 1), so the robot arm was stuck at the receiver end, and lost communication. I tried to set it back home, but it didn't work. :(

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