Problem AG4100 SNF 2008-08-26 16:31:10: intensity out of range

hzhou at engr.ucr.edu hzhou at engr.ucr.edu
Tue Aug 26 17:39:44 PDT 2008


in the error message, it say sth out of range(I couldn't remember what's the
exact words, but I check from the pic that's the intensity curve go up
suddenly), it's the same meaning as I told you.

You may try this recipe, I run 6 wafers that day and 3 wafers meet this 
problem.

775C 5Min


Quoting John Shott <shott at stanford.edu>:

> What, specifically, did the error message say?  Does it say the same 
> thing or something different if you try to run the same recipe again?
> Thanks,
>
> John
>
>



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